Numerical and experimental analysis of transient state micro-bounce of aerostatic guideways caused by small pores

T. Aoyama; K. Koizumi; Y. Kakinuma; Y. Kobayashi

doi:10.1016/j.cirp.2009.03.107

Numerical and experimental analysis of transient state micro-bounce of aerostatic guideways caused by small pores

T. Aoyama, K. Koizumi, Y. Kakinuma, Y. Kobayashi

Department of System Design Engineering

Research output: Contribution to journal › Article › peer-review

27 Citations (Scopus)

Abstract

Aerostatic guideways have been applied to precision machine elements. Recently, downsizing and the increased use of high-density technology in IT devices have generated demand for higher accuracy in aerostatic guideways. It has been pointed out that the micro-bounce occurs when the slider passes over the aerostatic guideway with small pores. This transient state micro-vibration decreases the accuracy of aerostatic guideways and, thus, it is now expected to be suppressed. The purpose of this study is to analyze the micro-bounce mechanism of aerostatic guideways caused by pores, and to propose new designs for the suppression of micro-bounce.

Original language	English
Pages (from-to)	367-370
Number of pages	4
Journal	CIRP Annals - Manufacturing Technology
Volume	58
Issue number	1
DOIs	https://doi.org/10.1016/j.cirp.2009.03.107
Publication status	Published - 2009

Keywords

Bearing
Design
Vibration

ASJC Scopus subject areas

Mechanical Engineering
Industrial and Manufacturing Engineering

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10.1016/j.cirp.2009.03.107

Cite this

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abstract = "Aerostatic guideways have been applied to precision machine elements. Recently, downsizing and the increased use of high-density technology in IT devices have generated demand for higher accuracy in aerostatic guideways. It has been pointed out that the micro-bounce occurs when the slider passes over the aerostatic guideway with small pores. This transient state micro-vibration decreases the accuracy of aerostatic guideways and, thus, it is now expected to be suppressed. The purpose of this study is to analyze the micro-bounce mechanism of aerostatic guideways caused by pores, and to propose new designs for the suppression of micro-bounce.",

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AU - Kobayashi, Y.

PY - 2009

Y1 - 2009

N2 - Aerostatic guideways have been applied to precision machine elements. Recently, downsizing and the increased use of high-density technology in IT devices have generated demand for higher accuracy in aerostatic guideways. It has been pointed out that the micro-bounce occurs when the slider passes over the aerostatic guideway with small pores. This transient state micro-vibration decreases the accuracy of aerostatic guideways and, thus, it is now expected to be suppressed. The purpose of this study is to analyze the micro-bounce mechanism of aerostatic guideways caused by pores, and to propose new designs for the suppression of micro-bounce.

AB - Aerostatic guideways have been applied to precision machine elements. Recently, downsizing and the increased use of high-density technology in IT devices have generated demand for higher accuracy in aerostatic guideways. It has been pointed out that the micro-bounce occurs when the slider passes over the aerostatic guideway with small pores. This transient state micro-vibration decreases the accuracy of aerostatic guideways and, thus, it is now expected to be suppressed. The purpose of this study is to analyze the micro-bounce mechanism of aerostatic guideways caused by pores, and to propose new designs for the suppression of micro-bounce.

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KW - Design

KW - Vibration

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Numerical and experimental analysis of transient state micro-bounce of aerostatic guideways caused by small pores

Abstract

Keywords

ASJC Scopus subject areas

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