The deposition of power into electrons and ions in a collision-dominated inductively coupled plasma has been investigated in Ar in a cylindrical reactor wound uniformly around it which has ribbon shaped current coil using particle-in-cell/Monte Carlo simulation. Electrons obtain energy from the temporally varying induced azimuthal field, while heavy ions are only slightly heated by the electrostatic radial field caused by a wall sheath in front of the reactor wall.
|Number of pages
|Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
|Published - 1999 Jul
ASJC Scopus subject areas
- General Engineering
- General Physics and Astronomy