Abstract
The effects of induction frequency on inductively coupled plasma (ICP) have been investigated in a collision-dominated region in Ar under a constant dissipated power using the particle-in-cell/Monte Carlo (PIC/MC) simulation. The plasma density, potential, electron energy distribution and mean electron energy are discussed as a function of the applied frequencies of 6.78 MHz, 13.56 MHz, 27.12 MHz and 100 MHz at pressure of 100 mTorr and 300 mTorr.
| Original language | English |
|---|---|
| Pages (from-to) | 1358-1364 |
| Number of pages | 7 |
| Journal | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
| Volume | 39 |
| Issue number | 3 A |
| DOIs | |
| Publication status | Published - 2000 |
| Externally published | Yes |
Keywords
- Electron energy distribution
- ICP
- Induction frequency
- PIC/MCS
- Temporal mean energy characteristics
ASJC Scopus subject areas
- Engineering(all)
- Physics and Astronomy(all)