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Oxidation-enhanced Si self-diffusion in isotopically modulated silicon nanopillars
Ryotaro Kiga, Sayaka Hayashi, Satoru Miyamoto, Yasuo Shimizu, Yasuyoshi Nagai, Tetsuo Endoh, Kohei M. Itoh
Research output: Contribution to journal › Article › peer-review
4
Citations
(Scopus)