Polarization-induced two-dimensional electron gases in ZnMgO/ZnO heterostructures

H. Tampo, H. Shibata, K. Maejima, A. Yamada, K. Matsubara, P. Fons, S. Kashiwaya, S. Niki, Y. Chiba, T. Wakamatsu, H. Kanie

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129 Citations (Scopus)


Both the formation mechanism and the origin of the two-dimensional electron gas (2DEG) in ZnMgO/ZnO heterostructures have been investigated. The 2DEG in the heterostructures was confirmed to originate from polarization-induced charge and was found to be dominant for transport at low temperatures as well as room temperature (RT) by transport measurements. The origin of 2DEG was concluded to be the surface of the ZnMgO layer based on both capacitance-voltage measurements and the dependence of the carrier concentration on the ZnMgO layer thickness. The largest sheet carrier concentration was 1.1× 1013 cm -2 and the highest mobility for the heterostructure was obtained for a Mg composition of 0.61 at RT.

Original languageEnglish
Article number202104
JournalApplied Physics Letters
Issue number20
Publication statusPublished - 2008
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)


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