Pre-deformation-assisted cryogenic micromachining for fabrication of three-dimensional unique micro channels

Koji Mishima, Yasuhiro Kakinuma, Tojiro Aoyama

Research output: Contribution to journalArticlepeer-review

13 Citations (Scopus)


Polydimethylsiloxane (PDMS) is difficult to machine by conventional cutting process because of its low elasticity and high adhesion. We proposed the cryogenic micromachining method assisted by liquid nitrogen cooling for direct fabrication of 3D micro channels on PDMS substrate in short time. In this paper, the cryogenic cutting mechanism is clarified through some verification experiments. Moreover, Pre-Deformation-assisted Cryogenic Micromachining (PDCM) method is also proposed for fabricating the unique shapes of channels and its validity is evaluated experimentally. The results of cutting tests show that 3D unique micro channels can be processed precisely and rapidly on PDMS.

Original languageEnglish
Pages (from-to)936-947
Number of pages12
JournalJournal of Advanced Mechanical Design, Systems and Manufacturing
Issue number5
Publication statusPublished - 2010


  • 3D shaped channel
  • Cryogenic micromachining
  • Microfluidic chip-TAS
  • PDMS

ASJC Scopus subject areas

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering


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