Pre-deformation-assisted cryogenic micromachining for fabrication of three-dimensional unique micro channels

Koji Mishima; Masaomi Yamamoto; Yasuhiro Kakinuma; Tojiro Aoyama

Pre-deformation-assisted cryogenic micromachining for fabrication of three-dimensional unique micro channels

Koji Mishima, Masaomi Yamamoto, Yasuhiro Kakinuma, Tojiro Aoyama

Research output: Contribution to conference › Paper › peer-review

Abstract

Polydimethylsiloxane (PDMS) is difficult to machine by conventional cutting process because of its low elasticity and high adhesion. We proposed the cryogenic micromachining method assisted by liquid nitrogen cooling for direct fabrication of 3D micro channels on PDMS substrate in short time. In this paper, the cryogenic cutting mechanism is clarified through some verification experiments. Moreover, Pre-Deformation-assisted Cryogenic Micromachining (PDCM) method is also proposed for fabricating the unique shape of channels and its validity is evaluated experimentally. The results of cutting tests show that 3D unique micro channels can be processed precisely and rapidly on PDMS.

Original language	English
Publication status	Published - 2009
Event	5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009 - Osaka, Japan Duration: 2009 Dec 2 → 2009 Dec 4

Other

Other	5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009
Country/Territory	Japan
City	Osaka
Period	09/12/2 → 09/12/4

Keywords

3D shaped channel
Cryogenic micromachining
Microfluidic chip
PDMS
μ-TAS

ASJC Scopus subject areas

Industrial and Manufacturing Engineering

Cite this

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title = "Pre-deformation-assisted cryogenic micromachining for fabrication of three-dimensional unique micro channels",

abstract = "Polydimethylsiloxane (PDMS) is difficult to machine by conventional cutting process because of its low elasticity and high adhesion. We proposed the cryogenic micromachining method assisted by liquid nitrogen cooling for direct fabrication of 3D micro channels on PDMS substrate in short time. In this paper, the cryogenic cutting mechanism is clarified through some verification experiments. Moreover, Pre-Deformation-assisted Cryogenic Micromachining (PDCM) method is also proposed for fabricating the unique shape of channels and its validity is evaluated experimentally. The results of cutting tests show that 3D unique micro channels can be processed precisely and rapidly on PDMS.",

keywords = "3D shaped channel, Cryogenic micromachining, Microfluidic chip, PDMS, μ-TAS",

author = "Koji Mishima and Masaomi Yamamoto and Yasuhiro Kakinuma and Tojiro Aoyama",

year = "2009",

language = "English",

note = "5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009 ; Conference date: 02-12-2009 Through 04-12-2009",

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TY - CONF

T1 - Pre-deformation-assisted cryogenic micromachining for fabrication of three-dimensional unique micro channels

AU - Mishima, Koji

AU - Yamamoto, Masaomi

AU - Kakinuma, Yasuhiro

AU - Aoyama, Tojiro

PY - 2009

Y1 - 2009

N2 - Polydimethylsiloxane (PDMS) is difficult to machine by conventional cutting process because of its low elasticity and high adhesion. We proposed the cryogenic micromachining method assisted by liquid nitrogen cooling for direct fabrication of 3D micro channels on PDMS substrate in short time. In this paper, the cryogenic cutting mechanism is clarified through some verification experiments. Moreover, Pre-Deformation-assisted Cryogenic Micromachining (PDCM) method is also proposed for fabricating the unique shape of channels and its validity is evaluated experimentally. The results of cutting tests show that 3D unique micro channels can be processed precisely and rapidly on PDMS.

AB - Polydimethylsiloxane (PDMS) is difficult to machine by conventional cutting process because of its low elasticity and high adhesion. We proposed the cryogenic micromachining method assisted by liquid nitrogen cooling for direct fabrication of 3D micro channels on PDMS substrate in short time. In this paper, the cryogenic cutting mechanism is clarified through some verification experiments. Moreover, Pre-Deformation-assisted Cryogenic Micromachining (PDCM) method is also proposed for fabricating the unique shape of channels and its validity is evaluated experimentally. The results of cutting tests show that 3D unique micro channels can be processed precisely and rapidly on PDMS.

KW - 3D shaped channel

KW - Cryogenic micromachining

KW - Microfluidic chip

KW - PDMS

KW - μ-TAS

UR - http://www.scopus.com/inward/record.url?scp=84883434449&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84883434449&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:84883434449

T2 - 5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009

Y2 - 2 December 2009 through 4 December 2009

ER -

Pre-deformation-assisted cryogenic micromachining for fabrication of three-dimensional unique micro channels

Abstract

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Keywords

ASJC Scopus subject areas

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