TY - JOUR
T1 - Preface to the special issue on "design and fabrication of integrated sensor"
AU - Matsumoto, Yoshinori
PY - 2011
Y1 - 2011
UR - http://www.scopus.com/inward/record.url?scp=80055007015&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=80055007015&partnerID=8YFLogxK
U2 - 10.1541/ieejsmas.131.343
DO - 10.1541/ieejsmas.131.343
M3 - Editorial
AN - SCOPUS:80055007015
SN - 1341-8939
VL - 131
SP - 343
JO - ieej transactions on sensors and micromachines
JF - ieej transactions on sensors and micromachines
IS - 10
ER -