Abstract
Graded-morphology diamond thin films were prepared in a single experimental run using a simple technique during the chemical vapor deposition (CVD) process: one end of the substrate was elevated. We showed that the substrate temperature had a profound effect on the morphology and grain size of the as-deposited lightly boron-doped diamond films. We have discussed the morphological dependence of electrochemical properties as one example of the excellent function of the graded film.
| Original language | English |
|---|---|
| Pages (from-to) | 19-23 |
| Number of pages | 5 |
| Journal | Materials Science and Engineering B: Solid-State Materials for Advanced Technology |
| Volume | 83 |
| Issue number | 1-3 |
| DOIs | |
| Publication status | Published - 2001 Jun 21 |
| Externally published | Yes |
Keywords
- Diamond thin film
- Electrochemistry
- Graded-morphology
ASJC Scopus subject areas
- General Materials Science
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering
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