Pressure Sensor with A Corrugated Structure Utilizing Lig Sensing Element

Ryo Oda; Rihachiro Nakashima; Hidetoshi Takahashi

Pressure Sensor with A Corrugated Structure Utilizing Lig Sensing Element

Ryo Oda
, Rihachiro Nakashima
, Hidetoshi Takahashi

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

2 Citations (Scopus)

Abstract

This paper reports on a pressure sensor with a corrugated structure utilizing a laser-induced graphene (LIG) strain gauge. A concentrically expanding corrugated structure is formed on a polyimide (PI) film by a UV laser. A LIG layer, which function as a piezoresistor, is directly formed by a CO₂ laser to the outermost circumference of the corrugated structure. Using two different-types laser processing, a highly sensitive pressure sensor is easily realized. Here we theoretically and experimentally show the proposed method usefulness by evaluating the sensor response.

Original language	English
Title of host publication	2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1601-1603
Number of pages	3
ISBN (Electronic)	9784886864352
Publication status	Published - 2023
Event	22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023 - Kyoto, Japan Duration: 2023 Jun 25 → 2023 Jun 29

Publication series

Name	2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023

Conference

Conference	22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023
Country/Territory	Japan
City	Kyoto
Period	23/6/25 → 23/6/29

Keywords

Corrugated structure
Laser-induced graphene
Pressure sensor

ASJC Scopus subject areas

Computer Science Applications
Electrical and Electronic Engineering
Control and Optimization
Instrumentation

Cite this

Oda, R., Nakashima, R., & Takahashi, H. (2023). Pressure Sensor with A Corrugated Structure Utilizing Lig Sensing Element. In 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023 (pp. 1601-1603). (2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023). Institute of Electrical and Electronics Engineers Inc..

Pressure Sensor with A Corrugated Structure Utilizing Lig Sensing Element. / Oda, Ryo; Nakashima, Rihachiro; Takahashi, Hidetoshi.
2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023. Institute of Electrical and Electronics Engineers Inc., 2023. p. 1601-1603 (2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Oda, R, Nakashima, R & Takahashi, H 2023, Pressure Sensor with A Corrugated Structure Utilizing Lig Sensing Element. in 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023. 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023, Institute of Electrical and Electronics Engineers Inc., pp. 1601-1603, 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023, Kyoto, Japan, 23/6/25.

Oda R, Nakashima R, Takahashi H. Pressure Sensor with A Corrugated Structure Utilizing Lig Sensing Element. In 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023. Institute of Electrical and Electronics Engineers Inc. 2023. p. 1601-1603. (2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023).

Oda, Ryo ; Nakashima, Rihachiro ; Takahashi, Hidetoshi. / Pressure Sensor with A Corrugated Structure Utilizing Lig Sensing Element. 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023. Institute of Electrical and Electronics Engineers Inc., 2023. pp. 1601-1603 (2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023).

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abstract = "This paper reports on a pressure sensor with a corrugated structure utilizing a laser-induced graphene (LIG) strain gauge. A concentrically expanding corrugated structure is formed on a polyimide (PI) film by a UV laser. A LIG layer, which function as a piezoresistor, is directly formed by a CO2 laser to the outermost circumference of the corrugated structure. Using two different-types laser processing, a highly sensitive pressure sensor is easily realized. Here we theoretically and experimentally show the proposed method usefulness by evaluating the sensor response.",

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AB - This paper reports on a pressure sensor with a corrugated structure utilizing a laser-induced graphene (LIG) strain gauge. A concentrically expanding corrugated structure is formed on a polyimide (PI) film by a UV laser. A LIG layer, which function as a piezoresistor, is directly formed by a CO2 laser to the outermost circumference of the corrugated structure. Using two different-types laser processing, a highly sensitive pressure sensor is easily realized. Here we theoretically and experimentally show the proposed method usefulness by evaluating the sensor response.

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ER -

Pressure Sensor with A Corrugated Structure Utilizing Lig Sensing Element

Abstract

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Keywords

ASJC Scopus subject areas

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