Production technology of large-area multicrystalline silicon solar cells

Shuich Fujii, Yuko Fukawa, Hiroaki Takahashi, Yosuke Inomata, Kenichi Okada, Kenji Fukui, Katsuhiko Shirasawa

Research output: Contribution to journalArticlepeer-review

13 Citations (Scopus)


In 1996 a conversion efficiency of 17.1% had been obtained on 15 cm × 15 cm mc-Si solar cell. In this paper, large-scale production technology of the high-efficiency processing will be discussed. Enlarging reactive ion etching (RIE) equipment size, technology of passivation, and fine contact grid with low resistance by screenprinted metallization, which is firing through PECVD SiN, have been investigated.

Original languageEnglish
Pages (from-to)269-275
Number of pages7
JournalSolar Energy Materials and Solar Cells
Issue number1
Publication statusPublished - 2001 Jan
Externally publishedYes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Renewable Energy, Sustainability and the Environment
  • Surfaces, Coatings and Films


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