Quartz crystal microbalance (QCM) sensor for CH3SH gas by using polyelectrolyte-coated sol-gel film

Masashi Kikuchi, Seimei Shiratori

Research output: Contribution to journalArticlepeer-review

44 Citations (Scopus)


A new structure of sensing film for QCM sensor electrode was investigated. Gas-sensing device for toxic gases requires high sensor sensitivity and quick response. Increasing the surface area of sensing film was effective to improve the sensor sensitivity and response speed of QCM sensors, however it is difficult to increase the surface area of polymeric film. In this paper, Al 2O3 porous film was coated on QCM substrate by sol-gel method between the QCM electrode and polymeric layer in order to increase the surface area of polymeric layer. By using this manner, polymeric sensing films with high porosity can be fabricated without high-temperature treatment. The sensor was evaluated for the detection of methyl mercaptan (CH3SH) by using poly(ethylene imine) (PEI) as polymeric layer. The sensor with Al 2O3 porous layer showed high sensitivity and quick response rather than the sensor without the inorganic layer. The Al 2O3 layer worked for increasing the surface area of polyelectrolyte layer which resulted in the increasing of the sensor sensitivity.

Original languageEnglish
Pages (from-to)564-571
Number of pages8
JournalSensors and Actuators, B: Chemical
Issue number1-2 SPEC. ISS.
Publication statusPublished - 2005 Jul 22


  • AlO
  • CHSH
  • Gas sensor
  • Layer-by-layer self-assembly
  • Poly(ethylene imine)
  • Quartz crystal microbalance
  • Sol-gel method

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry


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