Reflectance and fluorescence imaging with a MEMS dual-axes confocal microscope

Hyejun Ra, Wibool Piyawattanametha, Yoshihiro Taguchi, Olav Solgaard

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)


This paper presents a dual-axes confocal microscope based on a two-dimensional (2-D) MicroElectroMechanical system (MEMS) scanner. Dual-axes confocal microscopy provides high resolution in both transverse and axial directions, and is also well-suited for miniaturization and integration into endoscopes for in vivo imaging. The gimbaled MEMS scanner is fabricated on a double silicon-on-insulator (SOI) wafer (a silicon wafer bonded on a SOI wafer) and is actuated by self-aligned, vertical, electrostatic combdrives. The reflecting surface of the scanner is covered with a 10-nm aluminum layer. Reflectance and fluorescence imaging is successfully demonstrated in a breadboard setup. Images with a maximum field of view (FOV) of 340 μm × 420 μm are achieved at 8 frames per second. The transverse resolution is 3.9 μm and 6.7 μm for the horizontal and vertical dimensions, respectively.

Original languageEnglish
Title of host publicationMOEMS and Miniaturized Systems VI
Publication statusPublished - 2007
Externally publishedYes
EventMOEMS and Miniaturized Systems VI - San Jose, CA, United States
Duration: 2007 Jan 242007 Jan 25

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X


OtherMOEMS and Miniaturized Systems VI
Country/TerritoryUnited States
CitySan Jose, CA


  • Dual-axes confocal microscopy
  • Electrostatic actuation
  • Micromirror
  • Scanning confocal microscopy
  • Self-alignment
  • Two-dimensional (2-D) MEMS scanner
  • Vertical comb actuators

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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