TY - GEN
T1 - Reliability assessment of MEMS structure of Su-8 thin film
AU - Park, Jun Hyub
AU - Lee, Hak Joo
AU - An, Joong Hyok
AU - Roh, Hee Yuel
AU - Kim, Yun Jae
AU - Kim, Sang Hyun
PY - 2007
Y1 - 2007
N2 - This paper describes new test method for obtaining static and dynamic characteristics of thin film and reliability evaluation method on MEMS device with thin film. The Su-8 is often used in micro-electro-mechanical systems devices. Durability should be ensured for such devices under cycling load. Therefore, with the proposed specimen and test procedure, tensile test was performed to obtain mechanical properties. The specimen was made with dimensions of 1000μm long, 9 and 11μm thickness, and 3 kinds of width, 50, 100 and 150μm. Behaviors of Su-8 have the 3 kinds of stress-strain curves. The mechanical characteristics of Su-8 were multiple, showing characteristics of brittle and ductile material and polymer. It was found that the mechanical properties of Su-8 did not have any effect on thickness. High cycle fatigue test was performed to obtain probability of failure at a given stress. We found that fatigue life of Su-8 was very susceptible to stress level and then strength-stress model was suitable for the assessment of durability of MEMS structure under cycling load.
AB - This paper describes new test method for obtaining static and dynamic characteristics of thin film and reliability evaluation method on MEMS device with thin film. The Su-8 is often used in micro-electro-mechanical systems devices. Durability should be ensured for such devices under cycling load. Therefore, with the proposed specimen and test procedure, tensile test was performed to obtain mechanical properties. The specimen was made with dimensions of 1000μm long, 9 and 11μm thickness, and 3 kinds of width, 50, 100 and 150μm. Behaviors of Su-8 have the 3 kinds of stress-strain curves. The mechanical characteristics of Su-8 were multiple, showing characteristics of brittle and ductile material and polymer. It was found that the mechanical properties of Su-8 did not have any effect on thickness. High cycle fatigue test was performed to obtain probability of failure at a given stress. We found that fatigue life of Su-8 was very susceptible to stress level and then strength-stress model was suitable for the assessment of durability of MEMS structure under cycling load.
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UR - http://www.scopus.com/inward/citedby.url?scp=34547927187&partnerID=8YFLogxK
U2 - 10.1115/MNC2007-21306
DO - 10.1115/MNC2007-21306
M3 - Conference contribution
AN - SCOPUS:34547927187
SN - 0791842657
SN - 9780791842652
T3 - Proceedings of the International Conference on Integration and Commercialization of Micro and Nanosystems 2007
SP - 495
EP - 500
BT - Proceedings of the International Conference on Integration and Commercialization of Micro and Nanosystems 2007
T2 - International Conference on Integration and Commercialization of Micro and Nanosystems 2007
Y2 - 10 January 2007 through 13 January 2007
ER -