Robot assisted optical emission tomography in an inductively coupled plasma reactor

Akifumi Okigawa; Toshiaki Makabe; Takeshi Shibagaki; Nobuhiko Nakano; Zoran Lj Petrovic; Takeki Kogawa; Akihiko Itoh

doi:10.1143/jjap.35.1890

Robot assisted optical emission tomography in an inductively coupled plasma reactor

Akifumi Okigawa, Toshiaki Makabe, Takeshi Shibagaki, Nobuhiko Nakano, Zoran Lj Petrovic, Takeki Kogawa, Akihiko Itoh

Department of Electronics and Electrical Engineering

Research output: Contribution to journal › Article › peer-review

40 Citations (Scopus)

Abstract

The influence of external plasma parameters on the spatial profile of an inductively coupled plasma in Ar driven by a one-turn radiofrequency current coil at 13.56 MHz has been investigated by robot-assisted optical emission tomography. The absolute value of the net excitation rate to Ar(3p₅) is discussed as functions of gas flow, gas pressure and power dissipation.

Original language	English
Pages (from-to)	1890-1893
Number of pages	4
Journal	Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume	35
Issue number	3
DOIs	https://doi.org/10.1143/jjap.35.1890
Publication status	Published - 1996 Mar

Keywords

Computered tomography
Inductively coupled plasma
Net excitation rate

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

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10.1143/jjap.35.1890

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abstract = "The influence of external plasma parameters on the spatial profile of an inductively coupled plasma in Ar driven by a one-turn radiofrequency current coil at 13.56 MHz has been investigated by robot-assisted optical emission tomography. The absolute value of the net excitation rate to Ar(3p5) is discussed as functions of gas flow, gas pressure and power dissipation.",

keywords = "Computered tomography, Inductively coupled plasma, Net excitation rate",

author = "Akifumi Okigawa and Toshiaki Makabe and Takeshi Shibagaki and Nobuhiko Nakano and Petrovic, {Zoran Lj} and Takeki Kogawa and Akihiko Itoh",

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AU - Okigawa, Akifumi

AU - Makabe, Toshiaki

AU - Shibagaki, Takeshi

AU - Nakano, Nobuhiko

AU - Petrovic, Zoran Lj

AU - Kogawa, Takeki

AU - Itoh, Akihiko

PY - 1996/3

Y1 - 1996/3

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AB - The influence of external plasma parameters on the spatial profile of an inductively coupled plasma in Ar driven by a one-turn radiofrequency current coil at 13.56 MHz has been investigated by robot-assisted optical emission tomography. The absolute value of the net excitation rate to Ar(3p5) is discussed as functions of gas flow, gas pressure and power dissipation.

KW - Computered tomography

KW - Inductively coupled plasma

KW - Net excitation rate

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Robot assisted optical emission tomography in an inductively coupled plasma reactor

Abstract

Keywords

ASJC Scopus subject areas

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