Selective dissociative ionization of sih4, si2h6and si3h8by electron impact in supersonic free jets

Teruaki Motooka; Paul Fons; Hiroshi Abe; Takashi Tokuyama

doi:10.1143/JJAP.32.L879

Selective dissociative ionization of sih₄, si₂h₆and si₃h₈by electron impact in supersonic free jets

Teruaki Motooka, Paul Fons, Hiroshi Abe, Takashi Tokuyama

Research output: Contribution to journal › Article › peer-review

6 Citations (Scopus)

Abstract

Low-energy (E=10-14 eV) electron-impact decomposition of SiH₄, Si₂H₆, and Si₃H₈into ionic species in a pulsed supersonic free jet has been investigated using quadrupole mass spectrometry. Si⁺was the common primary dissociated product for E<13 eV, while at E=14 eV, SiH₂⁺and SiH₃⁺became the primary species in the dissociation of SiH₄and Si₂H₆, respectively.

Original language	English
Pages (from-to)	L879-L882
Journal	Japanese journal of applied physics
Volume	32
Issue number	6 B
DOIs	https://doi.org/10.1143/JJAP.32.L879
Publication status	Published - 1993 Jun
Externally published	Yes

Keywords

Electron impact
Quadrupole mass spectrometry
Silicon
Supersonic free jet

ASJC Scopus subject areas

Engineering(all)
Physics and Astronomy(all)

Access to Document

10.1143/JJAP.32.L879

Cite this

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title = "Selective dissociative ionization of sih4, si2h6and si3h8by electron impact in supersonic free jets",

abstract = "Low-energy (E=10-14 eV) electron-impact decomposition of SiH4, Si2H6, and Si3H8into ionic species in a pulsed supersonic free jet has been investigated using quadrupole mass spectrometry. Si+was the common primary dissociated product for E<13 eV, while at E=14 eV, SiH2+and SiH3+became the primary species in the dissociation of SiH4and Si2H6, respectively.",

keywords = "Electron impact, Quadrupole mass spectrometry, Silicon, Supersonic free jet",

author = "Teruaki Motooka and Paul Fons and Hiroshi Abe and Takashi Tokuyama",

year = "1993",

month = jun,

doi = "10.1143/JJAP.32.L879",

language = "English",

volume = "32",

pages = "L879--L882",

journal = "Japanese journal of applied physics",

issn = "0021-4922",

publisher = "Japan Society of Applied Physics",

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T1 - Selective dissociative ionization of sih4, si2h6and si3h8by electron impact in supersonic free jets

AU - Motooka, Teruaki

AU - Fons, Paul

AU - Abe, Hiroshi

AU - Tokuyama, Takashi

PY - 1993/6

Y1 - 1993/6

N2 - Low-energy (E=10-14 eV) electron-impact decomposition of SiH4, Si2H6, and Si3H8into ionic species in a pulsed supersonic free jet has been investigated using quadrupole mass spectrometry. Si+was the common primary dissociated product for E<13 eV, while at E=14 eV, SiH2+and SiH3+became the primary species in the dissociation of SiH4and Si2H6, respectively.

AB - Low-energy (E=10-14 eV) electron-impact decomposition of SiH4, Si2H6, and Si3H8into ionic species in a pulsed supersonic free jet has been investigated using quadrupole mass spectrometry. Si+was the common primary dissociated product for E<13 eV, while at E=14 eV, SiH2+and SiH3+became the primary species in the dissociation of SiH4and Si2H6, respectively.

KW - Electron impact

KW - Quadrupole mass spectrometry

KW - Silicon

KW - Supersonic free jet

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JO - Japanese journal of applied physics

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