Sensitivity Enhancement of An Acoustic Sensor via Parallel Helmholtz Resonators

Ruka Wada; Hidetoshi Takahashi

doi:10.1109/MEMS51670.2022.9699840

Sensitivity Enhancement of An Acoustic Sensor via Parallel Helmholtz Resonators

Ruka Wada, Hidetoshi Takahashi

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

This paper reports an acoustic sensor using a Helmholtz resonator (HR) array and a MEMS differential pressure (DP) sensor element. A piezoresistive cantilever type DP sensor is highly sensitive to acoustic waves around its mechanical resonant frequency (RF). By attaching a HR array of which RF is equal to the cantilever in front of the DP sensor like a cap, the sensitivity is enhanced at the RF. The developed sensor with the HR responded with 3 times higher sensitivity than without the HR, and realized a resolution of approximately 2 mPa without an electrical lock-in filter.

Original language	English
Title of host publication	35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	833-836
Number of pages	4
ISBN (Electronic)	9781665409117
DOIs	https://doi.org/10.1109/MEMS51670.2022.9699840
Publication status	Published - 2022
Event	35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 - Tokyo, Japan Duration: 2022 Jan 9 → 2022 Jan 13

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2022-January
ISSN (Print)	1084-6999

Conference

Conference	35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
Country/Territory	Japan
City	Tokyo
Period	22/1/9 → 22/1/13

Keywords

Acoustic sensor
Helmholtz resonator array
Piezoresitive cantilever

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMS51670.2022.9699840

Cite this

Wada, R., & Takahashi, H. (2022). Sensitivity Enhancement of An Acoustic Sensor via Parallel Helmholtz Resonators. In 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 (pp. 833-836). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2022-January). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMS51670.2022.9699840

Sensitivity Enhancement of An Acoustic Sensor via Parallel Helmholtz Resonators. / Wada, Ruka; Takahashi, Hidetoshi.
35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. Institute of Electrical and Electronics Engineers Inc., 2022. p. 833-836 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2022-January).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Wada, R & Takahashi, H 2022, Sensitivity Enhancement of An Acoustic Sensor via Parallel Helmholtz Resonators. in 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2022-January, Institute of Electrical and Electronics Engineers Inc., pp. 833-836, 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022, Tokyo, Japan, 22/1/9. https://doi.org/10.1109/MEMS51670.2022.9699840

Wada R, Takahashi H. Sensitivity Enhancement of An Acoustic Sensor via Parallel Helmholtz Resonators. In 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. Institute of Electrical and Electronics Engineers Inc. 2022. p. 833-836. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMS51670.2022.9699840

Wada, Ruka ; Takahashi, Hidetoshi. / Sensitivity Enhancement of An Acoustic Sensor via Parallel Helmholtz Resonators. 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. Institute of Electrical and Electronics Engineers Inc., 2022. pp. 833-836 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

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title = "Sensitivity Enhancement of An Acoustic Sensor via Parallel Helmholtz Resonators",

abstract = "This paper reports an acoustic sensor using a Helmholtz resonator (HR) array and a MEMS differential pressure (DP) sensor element. A piezoresistive cantilever type DP sensor is highly sensitive to acoustic waves around its mechanical resonant frequency (RF). By attaching a HR array of which RF is equal to the cantilever in front of the DP sensor like a cap, the sensitivity is enhanced at the RF. The developed sensor with the HR responded with 3 times higher sensitivity than without the HR, and realized a resolution of approximately 2 mPa without an electrical lock-in filter.",

keywords = "Acoustic sensor, Helmholtz resonator array, Piezoresitive cantilever",

author = "Ruka Wada and Hidetoshi Takahashi",

note = "Funding Information: This research was partially supported by Technova Award. Publisher Copyright: {\textcopyright} 2022 IEEE.; 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 ; Conference date: 09-01-2022 Through 13-01-2022",

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doi = "10.1109/MEMS51670.2022.9699840",

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AB - This paper reports an acoustic sensor using a Helmholtz resonator (HR) array and a MEMS differential pressure (DP) sensor element. A piezoresistive cantilever type DP sensor is highly sensitive to acoustic waves around its mechanical resonant frequency (RF). By attaching a HR array of which RF is equal to the cantilever in front of the DP sensor like a cap, the sensitivity is enhanced at the RF. The developed sensor with the HR responded with 3 times higher sensitivity than without the HR, and realized a resolution of approximately 2 mPa without an electrical lock-in filter.

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KW - Piezoresitive cantilever

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Sensitivity Enhancement of An Acoustic Sensor via Parallel Helmholtz Resonators

Abstract

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Keywords

ASJC Scopus subject areas

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