Silicon Isotope Technology for Quantum Computing

Satoru Miyamoto, Kohei M. Itoh

Research output: Chapter in Book/Report/Conference proceedingConference contribution


We present isotopically engineered Si-28/SiGe heterostructures for development of silicon-based quantum computers using a standard silicon CMOS integration technology. Our Si-28 quantum-wells are well-strained and demonstrate high electron mobility and large valley-splitting. These properties provide promising platforms for realization of highly integrated spin qubits working together with silicon CMOS circuits.

Original languageEnglish
Title of host publication2018 IEEE International Electron Devices Meeting, IEDM 2018
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781728119878
Publication statusPublished - 2018 Jul 2
Externally publishedYes
Event64th Annual IEEE International Electron Devices Meeting, IEDM 2018 - San Francisco, United States
Duration: 2018 Dec 12018 Dec 5

Publication series

NameTechnical Digest - International Electron Devices Meeting, IEDM
ISSN (Print)0163-1918


Conference64th Annual IEEE International Electron Devices Meeting, IEDM 2018
Country/TerritoryUnited States
CitySan Francisco

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry


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