Simulation of Magnetron Plasma

Eiji Shidoji, Toshiaki Makabe

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	767-772
Number of pages	6
Journal	Shinku/Journal of the Vacuum Society of Japan
Volume	43
Issue number	8
DOIs	https://doi.org/10.3131/jvsj.43.767
Publication status	Published - 2000 Jan

ASJC Scopus subject areas

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