Simultaneous detection of particles and airflow with a MEMS piezoresistive cantilever

Hidetoshi Takahashi, Tetsuo Kan, Kiyoshi Matsumoto, Isao Shimoyama

Research output: Contribution to journalArticlepeer-review

11 Citations (Scopus)


This paper describes a particle and airflow sensor using a MEMS piezoresistive cantilever with the dimensions of 250 μm × 200 μm × 0.29 μm. The sensor structure is simple and detects both the airflow velocity and particle collisions by measuring the fractional resistance change due to the cantilever bending. The signals of the airflow velocity and particle collisions can be simultaneously detected by distinguishing continuous and pulse responses. The sensitivity to the airflow velocity was 1.2 × 10 -3 (m/s)-1 from 0 to 2.5 m s-1. When a particle of 35 μm diameter (Lycopodium) collided with the cantilever surface, the fractional resistance change varied with the collision. After the collision, reverberation occurred at 3 kHz, which was the same as the resonance frequency of the cantilever. The magnitude of the fractional resistance changes due to particle collision was proportional to the airflow velocity. The sensitivity to particle collision was 2.0 × 10-3 (m/s)-1 when the airflow velocity varied between 0 and 2.5 m s-1.

Original languageEnglish
Article number025107
JournalMeasurement Science and Technology
Issue number2
Publication statusPublished - 2013 Feb
Externally publishedYes


  • MEMS
  • airflow
  • cantilever
  • particle collision

ASJC Scopus subject areas

  • Instrumentation
  • Engineering (miscellaneous)
  • Applied Mathematics


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