SiO2 clad active and passive photonic crystal nanocavity devices fabricated with photolithography Toward future mass production of photonic crystal nanocavity devices

Nurul Ashikin Binti Daud; Yuta Ooka; Tomohisa Tabata; Tomohiro Tetsumoto; Takasumi Tanabe

doi:10.1109/CLEOPR.2017.8119006

SiO₂ clad active and passive photonic crystal nanocavity devices fabricated with photolithography Toward future mass production of photonic crystal nanocavity devices

Nurul Ashikin Binti Daud, Yuta Ooka, Tomohisa Tabata, Tomohiro Tetsumoto, Takasumi Tanabe

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

We describe the fabrication and a demonstration of passive and active photonic crystal nanocavity devices, namely an electro-optic modulator, an all-silicon photodetector and a DeMUX filter. This is the first demonstration of active and passive photonic crystal nanocavity devices fabricated with a photolithographic process that may lead to future mass production.

Original language	English
Title of host publication	2017 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2017
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1-2
Number of pages	2
Volume	2017-January
ISBN (Electronic)	9781509062904
DOIs	https://doi.org/10.1109/CLEOPR.2017.8119006
Publication status	Published - 2017 Nov 22
Event	2017 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2017 - Singapore, Singapore Duration: 2017 Jul 31 → 2017 Aug 4

Other

Other	2017 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2017
Country/Territory	Singapore
City	Singapore
Period	17/7/31 → 17/8/4

Keywords

Components
Electro-optic devices
Integrated optics
Optical signal processing
Opto-electronics
Photonic crystal

ASJC Scopus subject areas

Computer Networks and Communications
Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics

Access to Document

10.1109/CLEOPR.2017.8119006

Cite this

Daud, N. A. B., Ooka, Y., Tabata, T., Tetsumoto, T., & Tanabe, T. (2017). SiO₂ clad active and passive photonic crystal nanocavity devices fabricated with photolithography Toward future mass production of photonic crystal nanocavity devices. In 2017 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2017 (Vol. 2017-January, pp. 1-2). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/CLEOPR.2017.8119006

SiO₂ clad active and passive photonic crystal nanocavity devices fabricated with photolithography Toward future mass production of photonic crystal nanocavity devices. / Daud, Nurul Ashikin Binti; Ooka, Yuta; Tabata, Tomohisa et al.
2017 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2017. Vol. 2017-January Institute of Electrical and Electronics Engineers Inc., 2017. p. 1-2.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Daud, NAB, Ooka, Y, Tabata, T, Tetsumoto, T & Tanabe, T 2017, SiO₂ clad active and passive photonic crystal nanocavity devices fabricated with photolithography Toward future mass production of photonic crystal nanocavity devices. in 2017 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2017. vol. 2017-January, Institute of Electrical and Electronics Engineers Inc., pp. 1-2, 2017 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2017, Singapore, Singapore, 17/7/31. https://doi.org/10.1109/CLEOPR.2017.8119006

Daud NAB, Ooka Y, Tabata T, Tetsumoto T, Tanabe T. SiO₂ clad active and passive photonic crystal nanocavity devices fabricated with photolithography Toward future mass production of photonic crystal nanocavity devices. In 2017 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2017. Vol. 2017-January. Institute of Electrical and Electronics Engineers Inc. 2017. p. 1-2 doi: 10.1109/CLEOPR.2017.8119006

Daud, Nurul Ashikin Binti ; Ooka, Yuta ; Tabata, Tomohisa et al. / SiO₂ clad active and passive photonic crystal nanocavity devices fabricated with photolithography Toward future mass production of photonic crystal nanocavity devices. 2017 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2017. Vol. 2017-January Institute of Electrical and Electronics Engineers Inc., 2017. pp. 1-2

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