SiO2 clad active and passive photonic crystal nanocavity devices fabricated with photolithography

Nurul Ashikin Binti Daud; Yuta Ooka; Tomohisa Tabata; Tomohiro Tetsumoto; Takasumi Tanabe

SiO₂ clad active and passive photonic crystal nanocavity devices fabricated with photolithography

Nurul Ashikin Binti Daud, Yuta Ooka, Tomohisa Tabata, Tomohiro Tetsumoto, Takasumi Tanabe

Department of Electronics and Electrical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We describe the fabrication and a demonstration of passive and active photonic crystal nanocavity devices, namely an electro-optic modulator, an all-silicon photodetector and a DeMUX filter. This is the first demonstration of active and passive photonic crystal nanocavity devices fabricated with a photolithographic process that may lead to future mass production.

Original language	English
Title of host publication	Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2017
Publisher	Optica Publishing Group (formerly OSA)
ISBN (Print)	9781509062904
Publication status	Published - 2017
Event	Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2017 - Singapore, Singapore Duration: 2017 Jul 31 → 2017 Aug 4

Publication series

Name	Optics InfoBase Conference Papers
Volume	Part F122-CLEOPR 2017
ISSN (Electronic)	2162-2701

Other

Other	Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2017
Country/Territory	Singapore
City	Singapore
Period	17/7/31 → 17/8/4

Keywords

Components
Electro-optic devices
Integrated optics
Optical signal processing
Opto-electronics
Photonic crystal

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Mechanics of Materials

Cite this

SiO₂ clad active and passive photonic crystal nanocavity devices fabricated with photolithography. / Daud, Nurul Ashikin Binti; Ooka, Yuta; Tabata, Tomohisa et al.
Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2017. Optica Publishing Group (formerly OSA), 2017. s2277 (Optics InfoBase Conference Papers; Vol. Part F122-CLEOPR 2017).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Daud, NAB, Ooka, Y, Tabata, T, Tetsumoto, T & Tanabe, T 2017, SiO₂ clad active and passive photonic crystal nanocavity devices fabricated with photolithography. in Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2017., s2277, Optics InfoBase Conference Papers, vol. Part F122-CLEOPR 2017, Optica Publishing Group (formerly OSA), Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2017, Singapore, Singapore, 17/7/31.

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