SiO2 clad active and passive photonic crystal nanocavity devices fabricated with photolithography

Nurul Ashikin Binti Daud; Yuta Ooka; Tomohisa Tabata; Tomohiro Tetsumoto; Takasumi Tanabe

SiO₂ clad active and passive photonic crystal nanocavity devices fabricated with photolithography

Nurul Ashikin Binti Daud
, Yuta Ooka
, Tomohisa Tabata
, Tomohiro Tetsumoto
, Takasumi Tanabe

Department of Electronics and Electrical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We describe the fabrication and a demonstration of passive and active photonic crystal nanocavity devices, namely an electro-optic modulator, an all-silicon photodetector and a DeMUX filter. This is the first demonstration of active and passive photonic crystal nanocavity devices fabricated with a photolithographic process that may lead to future mass production.

Original language	English
Title of host publication	Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2017
Publisher	Optica Publishing Group (formerly OSA)
ISBN (Print)	9781509062904
Publication status	Published - 2017
Event	Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2017 - Singapore, Singapore Duration: 2017 Jul 31 → 2017 Aug 4

Publication series

Name	Optics InfoBase Conference Papers
Volume	Part F122-CLEOPR 2017
ISSN (Electronic)	2162-2701

Other

Other	Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2017
Country/Territory	Singapore
City	Singapore
Period	17/7/31 → 17/8/4

Keywords

Components
Electro-optic devices
Integrated optics
Optical signal processing
Opto-electronics
Photonic crystal

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Mechanics of Materials

Cite this

SiO₂ clad active and passive photonic crystal nanocavity devices fabricated with photolithography. / Daud, Nurul Ashikin Binti; Ooka, Yuta; Tabata, Tomohisa et al.
Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2017. Optica Publishing Group (formerly OSA), 2017. s2277 (Optics InfoBase Conference Papers; Vol. Part F122-CLEOPR 2017).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Daud, NAB, Ooka, Y, Tabata, T, Tetsumoto, T & Tanabe, T 2017, SiO₂ clad active and passive photonic crystal nanocavity devices fabricated with photolithography. in Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2017., s2277, Optics InfoBase Conference Papers, vol. Part F122-CLEOPR 2017, Optica Publishing Group (formerly OSA), Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2017, Singapore, Singapore, 17/7/31.

@inproceedings{203f2b5e87f54457950a6b6e4dcf974d,

title = "SiO2 clad active and passive photonic crystal nanocavity devices fabricated with photolithography",

abstract = "We describe the fabrication and a demonstration of passive and active photonic crystal nanocavity devices, namely an electro-optic modulator, an all-silicon photodetector and a DeMUX filter. This is the first demonstration of active and passive photonic crystal nanocavity devices fabricated with a photolithographic process that may lead to future mass production.",

keywords = "Components, Electro-optic devices, Integrated optics, Optical signal processing, Opto-electronics, Photonic crystal",

author = "Daud, \{Nurul Ashikin Binti\} and Yuta Ooka and Tomohisa Tabata and Tomohiro Tetsumoto and Takasumi Tanabe",

note = "Publisher Copyright: {\textcopyright} 2018 Optics InfoBase Conference Papers. All rights reserved.; Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2017 ; Conference date: 31-07-2017 Through 04-08-2017",

year = "2017",

language = "English",

isbn = "9781509062904",

series = "Optics InfoBase Conference Papers",

publisher = "Optica Publishing Group (formerly OSA)",

booktitle = "Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2017",

}

TY - GEN

T1 - SiO2 clad active and passive photonic crystal nanocavity devices fabricated with photolithography

AU - Daud, Nurul Ashikin Binti

AU - Ooka, Yuta

AU - Tabata, Tomohisa

AU - Tetsumoto, Tomohiro

AU - Tanabe, Takasumi

PY - 2017

Y1 - 2017

N2 - We describe the fabrication and a demonstration of passive and active photonic crystal nanocavity devices, namely an electro-optic modulator, an all-silicon photodetector and a DeMUX filter. This is the first demonstration of active and passive photonic crystal nanocavity devices fabricated with a photolithographic process that may lead to future mass production.

AB - We describe the fabrication and a demonstration of passive and active photonic crystal nanocavity devices, namely an electro-optic modulator, an all-silicon photodetector and a DeMUX filter. This is the first demonstration of active and passive photonic crystal nanocavity devices fabricated with a photolithographic process that may lead to future mass production.

KW - Components

KW - Electro-optic devices

KW - Integrated optics

KW - Optical signal processing

KW - Opto-electronics

KW - Photonic crystal

UR - https://www.scopus.com/pages/publications/85059506415

UR - https://www.scopus.com/pages/publications/85059506415#tab=citedBy

M3 - Conference contribution

AN - SCOPUS:85059506415

SN - 9781509062904

T3 - Optics InfoBase Conference Papers

BT - Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2017

PB - Optica Publishing Group (formerly OSA)

T2 - Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2017

Y2 - 31 July 2017 through 4 August 2017

ER -