Sol-gel preparation of (100)-oriented LaNiO3 thin film electrodes

S. Miyake, S. Fujihara, T. Kimura

Research output: Contribution to journalConference articlepeer-review

1 Citation (Scopus)

Abstract

We prepared LaNiO3 (LNO) films on SiO2 glass substrates by a sol-gel method. Effects of heating conditions on the orientation, morphology and electrical properties of the films were investigated. Preferentially (100)-oriented LNO films could be formed on the glass substrate by controlling carefully the heat-treatment process. The optimal condition led to the formation of the film with low resistivity of 585 μΩcm, orientation factor of 1.00 and dense microstructure.

Original languageEnglish
Pages (from-to)93-96
Number of pages4
JournalKey Engineering Materials
Volume216
Publication statusPublished - 2001 Jan 1
Event20th Electronics Division Meeting of the Ceramic Society of Japan - Kawasaki, Japan
Duration: 2000 Oct 262000 Oct 27

Keywords

  • Electrode
  • LaNiO
  • Metallic conductivity
  • Orientation
  • Sol-gel method
  • Thin film

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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