TY - JOUR
T1 - Sol-gel processing and characterization of alkaline earth and rare-earth fluoride thin films
AU - Tada, Munehiro
AU - Fujihara, Shinobu
AU - Kimura, Toshio
N1 - Funding Information:
The authors thank Professor T. Yoko, Institute for Chemical Research, Kyoto University, for help with the ellipsometry measurement. This work was supported by a Grant-in-Aid for Scientific Research from the Ministry of Education, Science, and Culture of Japan (No. 09750757).
PY - 1999/4
Y1 - 1999/4
N2 - Alkaline earth and rare-earth fluoride thin films were prepared on silica glass substrates by a sol-gel process using trifluoroacetic acid (TFA) as a fluorine source. Homogeneous solutions were obtained by stirring a mixture of alkaline earth or rare-earth metal acetates, TFA and H2O, dissolved in isopropanol. The solutions were spin-coated and heated at 300-800°C. The fluoride thin films were obtained by heat treatment around 400°C in air. The crystallization behavior, the surface morphology, and the optical properties of the films depended on the heating temperature as well as the chemical species of the metal ions.
AB - Alkaline earth and rare-earth fluoride thin films were prepared on silica glass substrates by a sol-gel process using trifluoroacetic acid (TFA) as a fluorine source. Homogeneous solutions were obtained by stirring a mixture of alkaline earth or rare-earth metal acetates, TFA and H2O, dissolved in isopropanol. The solutions were spin-coated and heated at 300-800°C. The fluoride thin films were obtained by heat treatment around 400°C in air. The crystallization behavior, the surface morphology, and the optical properties of the films depended on the heating temperature as well as the chemical species of the metal ions.
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U2 - 10.1557/JMR.1999.0216
DO - 10.1557/JMR.1999.0216
M3 - Article
AN - SCOPUS:0032626079
SN - 0884-2914
VL - 14
SP - 1610
EP - 1616
JO - Journal of Materials Research
JF - Journal of Materials Research
IS - 4
ER -