Spring constant measurement using a MEMS force and displacement sensor utilizing paralleled piezoresistive cantilevers

Sumihiro Kohyama, Hidetoshi Takahashi, Satoru Yoshida, Hiroaki Onoe, Kayoko Hirayama-Shoji, Takuya Tsukagoshi, Tomoyuki Takahata, Isao Shimoyama

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

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Chemical Compounds

Engineering & Materials Science