Stress engineering in high-κ FETs for mobility and on-current enhancements

Keyphrases

• Biaxial Tensile Strain 66%
• Effective Field 66%
• Fixed Charge 33%
• Longitudinal Stress 33%
• Low-field Mobility 33%
• Remote Coulomb Scattering 33%
• Rough Surface Scattering 33%
• Transverse Tensile 33%
• Velocity Saturation 33%
• Weak Surface 33%

Material Science

• Field Effect Transistor 100%
• Film 33%
• Surface Roughness 33%
• Tensile Strain 66%
• Ultimate Tensile Strength 33%

Engineering

• Biaxial Stress 33%
• Effective Field 66%
• Longitudinal Stress 33%