Structural changes of CuGaSe2 films during the three-stage process observed by spectroscopic light scattering

K. Sakurai; S. Nakamura; T. Baba; Y. Kimura; A. Yamada; S. Ishizuka; K. Matsubara; P. Fons; R. Scheer; H. Nakanishi; S. Niki

doi:10.1016/j.tsf.2004.11.095

Structural changes of CuGaSe₂ films during the three-stage process observed by spectroscopic light scattering

K. Sakurai, S. Nakamura, T. Baba, Y. Kimura, A. Yamada, S. Ishizuka, K. Matsubara, P. Fons, R. Scheer, H. Nakanishi, S. Niki

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

We have studied the three-stage deposition process of CuGaSe₂ (CGS) films, with the help of spectroscopic light scattering (SLS) in situ monitoring method. During the second stage (i.e. deposition of Cu, Se), an abrupt change from a two-layered structure to a single layer, together with a significant increase in the grain size, was observed in the vicinity of the Cu/Ga=1.0 point. Shortly before this abrupt change, a characteristic peak was observed by SLS, accompanied by a definitive change in depth-oriented distribution of Cu and Na.

Original language	English
Pages (from-to)	367-372
Number of pages	6
Journal	Thin Solid Films
Volume	480-481
DOIs	https://doi.org/10.1016/j.tsf.2004.11.095
Publication status	Published - 2005 Jun 1
Externally published	Yes

Keywords

CuGaSe films
Deposition process
Spectroscopic light scattering

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

Access to Document

10.1016/j.tsf.2004.11.095

Cite this

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title = "Structural changes of CuGaSe2 films during the three-stage process observed by spectroscopic light scattering",

abstract = "We have studied the three-stage deposition process of CuGaSe2 (CGS) films, with the help of spectroscopic light scattering (SLS) in situ monitoring method. During the second stage (i.e. deposition of Cu, Se), an abrupt change from a two-layered structure to a single layer, together with a significant increase in the grain size, was observed in the vicinity of the Cu/Ga=1.0 point. Shortly before this abrupt change, a characteristic peak was observed by SLS, accompanied by a definitive change in depth-oriented distribution of Cu and Na.",

keywords = "CuGaSe films, Deposition process, Spectroscopic light scattering",

author = "K. Sakurai and S. Nakamura and T. Baba and Y. Kimura and A. Yamada and S. Ishizuka and K. Matsubara and P. Fons and R. Scheer and H. Nakanishi and S. Niki",

note = "Funding Information: This work was supported in part by the New Energy and Industrial Technology Development Organization (NEDO).",

year = "2005",

month = jun,

day = "1",

doi = "10.1016/j.tsf.2004.11.095",

language = "English",

volume = "480-481",

pages = "367--372",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier",

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TY - JOUR

T1 - Structural changes of CuGaSe2 films during the three-stage process observed by spectroscopic light scattering

AU - Sakurai, K.

AU - Nakamura, S.

AU - Baba, T.

AU - Kimura, Y.

AU - Yamada, A.

AU - Ishizuka, S.

AU - Matsubara, K.

AU - Fons, P.

AU - Scheer, R.

AU - Nakanishi, H.

AU - Niki, S.

N1 - Funding Information: This work was supported in part by the New Energy and Industrial Technology Development Organization (NEDO).

PY - 2005/6/1

Y1 - 2005/6/1

N2 - We have studied the three-stage deposition process of CuGaSe2 (CGS) films, with the help of spectroscopic light scattering (SLS) in situ monitoring method. During the second stage (i.e. deposition of Cu, Se), an abrupt change from a two-layered structure to a single layer, together with a significant increase in the grain size, was observed in the vicinity of the Cu/Ga=1.0 point. Shortly before this abrupt change, a characteristic peak was observed by SLS, accompanied by a definitive change in depth-oriented distribution of Cu and Na.

AB - We have studied the three-stage deposition process of CuGaSe2 (CGS) films, with the help of spectroscopic light scattering (SLS) in situ monitoring method. During the second stage (i.e. deposition of Cu, Se), an abrupt change from a two-layered structure to a single layer, together with a significant increase in the grain size, was observed in the vicinity of the Cu/Ga=1.0 point. Shortly before this abrupt change, a characteristic peak was observed by SLS, accompanied by a definitive change in depth-oriented distribution of Cu and Na.

KW - CuGaSe films

KW - Deposition process

KW - Spectroscopic light scattering

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