Study of delamination of thin film coating on cyclic nano-indentation test

Kentaro Kozuki, Masaki Omiya, Kikuo Kishimoto, Hirotsugu Inoue

Research output: Contribution to journalConference articlepeer-review

1 Citation (Scopus)


The aim of this paper is to evaluate the cyclic interfacial strength between thin film and its substrate by cyclic nano-indentation tests. The specimen used in this study is PET substrate/ITO coatings layered specimen. From the indentation load and displacement curve, we proposed an evaluation method for the interfacial strength. The results are good agreement with the interfacial strength evaluated by peel test. After cyclic indentations, the surface profile was observed by atomic force microscope. The number of elongates increased with indentation cycles when the indentation load is low, whereas elongates number is almost constant under high load cases. These phenomena can be explained by simple models. In this study, two types of fracture modes are proposed. They are "subsidiary fracture mode" and "buckling mode".

Original languageEnglish
Pages (from-to)1842-1845
Number of pages4
JournalKey Engineering Materials
Issue numberPART 3
Publication statusPublished - 2007 Jan 1
Externally publishedYes
EventAsian Pacific Conference for Fracture and Strength (APCFS'06) - Sanya, Hainan Island, China
Duration: 2006 Nov 222006 Nov 25


  • Cyclic loading
  • Delamination
  • Interface
  • Interfacial strength
  • Nano-indentation
  • Thin film

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering


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