Study of the structure of radio frequency glow discharges in CH4 and H2 by spatiotemporal optical emission spectroscopy

Fumiyoshi Tochikubo; Toshiaki Makabe; Shigeru Kakuta; Akira Suzuki

doi:10.1063/1.351137

Study of the structure of radio frequency glow discharges in CH₄ and H₂ by spatiotemporal optical emission spectroscopy

Fumiyoshi Tochikubo
, Toshiaki Makabe
, Shigeru Kakuta
, Akira Suzuki

Vice-President

Research output: Contribution to journal › Article › peer-review

54 Citations (Scopus)

Abstract

Radio frequency discharges at 13.56 MHz in CH₄(100%), CH ₄(10%)/H₂, and H₂(100%) are investigated by time- and space-resolved optical emission spectroscopy. The spatiotemporal net-excitation profile of H(n=3) is presented and discussed. The absolute value of the net-excitation rate, the emission intensity, and the density of the optically allowed electronic excited species are also measured. The self-quenching rate of H(n=3) and CH(A) by H₂ and CH₄ are estimated and compared with the previous works. The importance of the quenching of CH(A) by atomic hydrogen is also discussed. Excitation by very high-energy electrons is shown from the difference of the emission profile between H _α and H₂(d³Π_u→a ³Σ_g⁺) in H₂ at 100 kHz.

Original language	English
Pages (from-to)	2143-2150
Number of pages	8
Journal	Journal of Applied Physics
Volume	71
Issue number	5
DOIs	https://doi.org/10.1063/1.351137
Publication status	Published - 1992

ASJC Scopus subject areas

General Physics and Astronomy

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10.1063/1.351137

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title = "Study of the structure of radio frequency glow discharges in CH4 and H2 by spatiotemporal optical emission spectroscopy",

abstract = "Radio frequency discharges at 13.56 MHz in CH4(100\%), CH 4(10\%)/H2, and H2(100\%) are investigated by time- and space-resolved optical emission spectroscopy. The spatiotemporal net-excitation profile of H(n=3) is presented and discussed. The absolute value of the net-excitation rate, the emission intensity, and the density of the optically allowed electronic excited species are also measured. The self-quenching rate of H(n=3) and CH(A) by H2 and CH4 are estimated and compared with the previous works. The importance of the quenching of CH(A) by atomic hydrogen is also discussed. Excitation by very high-energy electrons is shown from the difference of the emission profile between H α and H2(d3Πu→a 3Σg+) in H2 at 100 kHz.",

author = "Fumiyoshi Tochikubo and Toshiaki Makabe and Shigeru Kakuta and Akira Suzuki",

year = "1992",

doi = "10.1063/1.351137",

language = "English",

volume = "71",

pages = "2143--2150",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

number = "5",

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TY - JOUR

T1 - Study of the structure of radio frequency glow discharges in CH4 and H2 by spatiotemporal optical emission spectroscopy

AU - Tochikubo, Fumiyoshi

AU - Makabe, Toshiaki

AU - Kakuta, Shigeru

AU - Suzuki, Akira

PY - 1992

Y1 - 1992

N2 - Radio frequency discharges at 13.56 MHz in CH4(100%), CH 4(10%)/H2, and H2(100%) are investigated by time- and space-resolved optical emission spectroscopy. The spatiotemporal net-excitation profile of H(n=3) is presented and discussed. The absolute value of the net-excitation rate, the emission intensity, and the density of the optically allowed electronic excited species are also measured. The self-quenching rate of H(n=3) and CH(A) by H2 and CH4 are estimated and compared with the previous works. The importance of the quenching of CH(A) by atomic hydrogen is also discussed. Excitation by very high-energy electrons is shown from the difference of the emission profile between H α and H2(d3Πu→a 3Σg+) in H2 at 100 kHz.

AB - Radio frequency discharges at 13.56 MHz in CH4(100%), CH 4(10%)/H2, and H2(100%) are investigated by time- and space-resolved optical emission spectroscopy. The spatiotemporal net-excitation profile of H(n=3) is presented and discussed. The absolute value of the net-excitation rate, the emission intensity, and the density of the optically allowed electronic excited species are also measured. The self-quenching rate of H(n=3) and CH(A) by H2 and CH4 are estimated and compared with the previous works. The importance of the quenching of CH(A) by atomic hydrogen is also discussed. Excitation by very high-energy electrons is shown from the difference of the emission profile between H α and H2(d3Πu→a 3Σg+) in H2 at 100 kHz.

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JO - Journal of Applied Physics

JF - Journal of Applied Physics

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Study of the structure of radio frequency glow discharges in CH₄ and H₂ by spatiotemporal optical emission spectroscopy

Abstract

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