Study on high-speed and compact optical bio-sensor for sample size analysis

Makoto Kamata; Kan Yamada; Yoshihiro Taguchi; Yuji Nagasaka

doi:10.1109/OMN.2016.7565850

Study on high-speed and compact optical bio-sensor for sample size analysis

Makoto Kamata, Kan Yamada, Yoshihiro Taguchi, Yuji Nagasaka

Department of System Design Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

A MEMS diffusion sensor utilizing the laser-induced dielectrophoresis is developed, and the photoconductive layer is deposited by the plain reactive RF magnetron sputtering method. The nano-scale size difference is observed using the newly fabricated sensor.

Original language	English
Title of host publication	2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings
Publisher	IEEE Computer Society
Volume	2016-September
ISBN (Electronic)	9781509010356
DOIs	https://doi.org/10.1109/OMN.2016.7565850
Publication status	Published - 2016 Sept 13
Event	21st International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Singapore, Singapore Duration: 2016 Jul 31 → 2016 Aug 4

Other

Other	21st International Conference on Optical MEMS and Nanophotonics, OMN 2016
Country/Territory	Singapore
City	Singapore
Period	16/7/31 → 16/8/4

Keywords

diffusion coefficient
laser-induced dielectrophoresis
photoconductive layer

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials

Access to Document

10.1109/OMN.2016.7565850

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Kamata, M, Yamada, K, Taguchi, Y & Nagasaka, Y 2016, Study on high-speed and compact optical bio-sensor for sample size analysis. in 2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings. vol. 2016-September, 7565850, IEEE Computer Society, 21st International Conference on Optical MEMS and Nanophotonics, OMN 2016, Singapore, Singapore, 16/7/31. https://doi.org/10.1109/OMN.2016.7565850

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title = "Study on high-speed and compact optical bio-sensor for sample size analysis",

abstract = "A MEMS diffusion sensor utilizing the laser-induced dielectrophoresis is developed, and the photoconductive layer is deposited by the plain reactive RF magnetron sputtering method. The nano-scale size difference is observed using the newly fabricated sensor.",

keywords = "diffusion coefficient, laser-induced dielectrophoresis, photoconductive layer",

author = "Makoto Kamata and Kan Yamada and Yoshihiro Taguchi and Yuji Nagasaka",

year = "2016",

month = sep,

day = "13",

doi = "10.1109/OMN.2016.7565850",

language = "English",

volume = "2016-September",

booktitle = "2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings",

publisher = "IEEE Computer Society",

note = "21st International Conference on Optical MEMS and Nanophotonics, OMN 2016 ; Conference date: 31-07-2016 Through 04-08-2016",

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TY - GEN

T1 - Study on high-speed and compact optical bio-sensor for sample size analysis

AU - Kamata, Makoto

AU - Yamada, Kan

AU - Taguchi, Yoshihiro

AU - Nagasaka, Yuji

PY - 2016/9/13

Y1 - 2016/9/13

N2 - A MEMS diffusion sensor utilizing the laser-induced dielectrophoresis is developed, and the photoconductive layer is deposited by the plain reactive RF magnetron sputtering method. The nano-scale size difference is observed using the newly fabricated sensor.

AB - A MEMS diffusion sensor utilizing the laser-induced dielectrophoresis is developed, and the photoconductive layer is deposited by the plain reactive RF magnetron sputtering method. The nano-scale size difference is observed using the newly fabricated sensor.

KW - diffusion coefficient

KW - laser-induced dielectrophoresis

KW - photoconductive layer

UR - http://www.scopus.com/inward/record.url?scp=84990195156&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84990195156&partnerID=8YFLogxK

U2 - 10.1109/OMN.2016.7565850

DO - 10.1109/OMN.2016.7565850

M3 - Conference contribution

AN - SCOPUS:84990195156

VL - 2016-September

BT - 2016 International Conference on Optical MEMS and Nanophotonics, OMN 2016 - Proceedings

PB - IEEE Computer Society

T2 - 21st International Conference on Optical MEMS and Nanophotonics, OMN 2016

Y2 - 31 July 2016 through 4 August 2016

ER -

Study on high-speed and compact optical bio-sensor for sample size analysis

Abstract

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Keywords

ASJC Scopus subject areas

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