Surface structures of (0001)/(0001) of ZnO single crystals

H. Maki, N. Ichinose, S. Sekiguchi, N. Ohashi, H. Haneda, J. Tanaka

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)


The wurtzite-type ZnO is a polar crystal, and its ideal (0001) surface is terminated by Zn ions while the (000 1 ) surface is terminated by oxygen ions. The surface structures of ZnO single crystals were evaluated by atomic force microscopy (AFM) and coaxial impact-collision ion scattering spectroscopy (CAICISS). The ZnO crystals were etched in HNOs and HC1 solutions, or annealed in Oi gas and vacuum at 800 °C and 950 °C to obtain flat surfaces in atomic scale. When etched in solutions and annealed in vacuum, the samples had rough O-terminated surfaces. The Znterminated and O-terminated surfaces had clear step/terrace structures only when treated in O2 gas at 950 °C for 3 hours. The CAICISS spectra were successfully analyzed on the basis of the step/terrace structure with the steps of half c-axis in height.

Original languageEnglish
Pages (from-to)109-112
Number of pages4
JournalKey Engineering Materials
Publication statusPublished - 1999
Externally publishedYes


  • Atomic force microscopy
  • Coaxial impact-collision ion scattering spectroscopy
  • Polar crystal
  • Surface structure
  • Zinc oxide

ASJC Scopus subject areas

  • General Materials Science
  • Mechanics of Materials
  • Mechanical Engineering


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