TY - JOUR
T1 - Synthesis of a closely packed carbon nanotube forest by a multi-step growth method using plasma-based chemical vapor deposition
AU - Yamazaki, Yuichi
AU - Katagiri, Masayuki
AU - Sakuma, Naoshi
AU - Suzuki, Mariko
AU - Sato, Shintaro
AU - Nihei, Mizuhisa
AU - Wada, Makoto
AU - Matsunaga, Noriaki
AU - Sakai, Tadashi
AU - Awano, Yuji
PY - 2010/5/1
Y1 - 2010/5/1
N2 - We report a synthesis of a closely packed multi-walled carbon nanotube (MWCNT) forest by a multi-step growth method, including a new approach to immobilize catalytic nanoparticles, using plasma-based chemical vapor deposition. The CNT packing density reaches one-half of the theoretical value, where the space of 30-40% is filled with MWCNTs. This value is approximately one order of magnitude larger than that of asgrown CNT forest synthesized using conventional methods. The method is applicable even at a spatially restricted region, for example, in trench or via hole, and is available at the growth temperature as low as 450°C.
AB - We report a synthesis of a closely packed multi-walled carbon nanotube (MWCNT) forest by a multi-step growth method, including a new approach to immobilize catalytic nanoparticles, using plasma-based chemical vapor deposition. The CNT packing density reaches one-half of the theoretical value, where the space of 30-40% is filled with MWCNTs. This value is approximately one order of magnitude larger than that of asgrown CNT forest synthesized using conventional methods. The method is applicable even at a spatially restricted region, for example, in trench or via hole, and is available at the growth temperature as low as 450°C.
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U2 - 10.1143/APEX.3.055002
DO - 10.1143/APEX.3.055002
M3 - Article
AN - SCOPUS:77952758637
SN - 1882-0778
VL - 3
JO - Applied Physics Express
JF - Applied Physics Express
IS - 5
M1 - 055002
ER -