TY - JOUR
T1 - Synthesis of diamond-like hydrocarbon films by atmospheric pressure filamentary dielectric barrier discharge
AU - Suzuki, T.
AU - Shirakura, A.
N1 - Publisher Copyright:
© Published under licence by IOP Publishing Ltd.
PY - 2018/6/12
Y1 - 2018/6/12
N2 - Diamond-like hydrocarbon (DLHC, a-C:H) films were synthesized under atmospheric pressure filamentary by dielectric discharge (FDBD) to improve their mechanical properties compared to the films synthesized by glow dielectric barrier discharge (GDBD). GDBD is generally used for atmospheric pressure-plasma-enhanced chemical vapour deposition. The discharge form transitioned from GDBD to FDBD by increasing the gap between electrodes from 1 to 4 mm. The hardness of the films increased from 3.7 to 11.9 GPa by using FDBD. The results indicate that hard DLHC films can be synthesized at room temperature and on a large area under atmospheric pressure using FDBD.
AB - Diamond-like hydrocarbon (DLHC, a-C:H) films were synthesized under atmospheric pressure filamentary by dielectric discharge (FDBD) to improve their mechanical properties compared to the films synthesized by glow dielectric barrier discharge (GDBD). GDBD is generally used for atmospheric pressure-plasma-enhanced chemical vapour deposition. The discharge form transitioned from GDBD to FDBD by increasing the gap between electrodes from 1 to 4 mm. The hardness of the films increased from 3.7 to 11.9 GPa by using FDBD. The results indicate that hard DLHC films can be synthesized at room temperature and on a large area under atmospheric pressure using FDBD.
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U2 - 10.1088/1757-899X/369/1/012046
DO - 10.1088/1757-899X/369/1/012046
M3 - Conference article
AN - SCOPUS:85049409476
SN - 1757-8981
VL - 369
JO - IOP Conference Series: Materials Science and Engineering
JF - IOP Conference Series: Materials Science and Engineering
IS - 1
M1 - 012046
T2 - 2018 5th Global Conference on Polymer and Composite Materials, PCM 2018
Y2 - 10 April 2018 through 13 April 2018
ER -