Technological advances in super fine finishing

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Focusing short wavelength radiations such as Extreme Ultra-Violet (EUV) and X-rays can be accomplished by assemblies of reflective aspheric optics. Application of such systems ranges from research in X-ray astronomy and microscopy, to semiconductors production by EUV lithography. But such optical surfaces require finishing to very low levels of micro-roughness, in proportion to the wavelength of incoming radiation. In this paper, recent advances in super fine finishing technologies (capable of achieving micro-roughness below 0.5 nm rms) for aspheric and freeform optical surfaces are presented. The paper deals with both ultra-precision grinding and polishing technologies, with the performance and advantages/disadvantages of each method being discussed, and examples of applications provided.

Original languageEnglish
Title of host publicationConference Proceedings - 14th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2014
EditorsR. Leach
Publishereuspen
Pages21-39
Number of pages19
ISBN (Electronic)9780956679031
Publication statusPublished - 2014
Externally publishedYes
Event14th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2014 - Dubrovnik, Croatia
Duration: 2014 Jun 22014 Jun 6

Publication series

NameConference Proceedings - 14th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2014
Volume1

Other

Other14th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2014
Country/TerritoryCroatia
CityDubrovnik
Period14/6/214/6/6

Keywords

  • EUV
  • Grinding
  • Polishing
  • Super-fine finishing
  • Ultra-precision
  • X-ray

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering
  • Mechanical Engineering
  • General Materials Science
  • Instrumentation
  • Environmental Engineering

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