Tetrahedral shaped recess channel HEMT with a floating quantum dot gate

M. Shima, Y. Sakuma, T. Futatsugi, Y. Awano, N. Yokoyama

Research output: Contribution to journalConference articlepeer-review

2 Citations (Scopus)


For the first time in the world, we achieved, at 77 K, a transistor and memory operation of a FET structure which was grown in a Tetrahedral-shaped recess (TSR-HEMT). This TSR-HEMT memory has a floating quantum dot (QD) gate at the bottom of the recess. Owing to the particular shape of the tetrahedral-shaped recess (TSR) structure, we were able to demonstrate that the charging of the floating QD gate can modulate the potential energy near the bottom by an amount of 9 meV and thus effectively modify the current. The measured I-V characteristics of the memory device clearly indicated a hysteresis at the sub-threshold gate bias region and a low power operation requiring write/erase voltages around only IV. The measured retention characteristics also showed that the device had a retention time of several minutes even at 100 K. We think that the TSR-HEMT is a promising structure for the use in future nanometer-scale microelectronics.

Original languageEnglish
Pages (from-to)437-440
Number of pages4
JournalTechnical Digest - International Electron Devices Meeting
Publication statusPublished - 1998 Dec 1
Externally publishedYes
EventProceedings of the 1998 IEEE International Electron Devices Meeting - San Francisco, CA, USA
Duration: 1998 Dec 61998 Dec 9

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry


Dive into the research topics of 'Tetrahedral shaped recess channel HEMT with a floating quantum dot gate'. Together they form a unique fingerprint.

Cite this