In this paper, we report on a direct measurement of the vibration on the surface of a droplet during its sliding on a micropillar array. The measurement is realized by using a MEMS-based force sensor fabricated under a micropillar. Our method provides direct information on the frequency of the vibration which was difficult to be obtained by conventional observation-based methods. We demonstrate that in case of a water droplet sliding on a 125 μm-pitch micropillar array, a vibration at frequency of approximately 3 kHz was found to occur on the droplet surface. Moreover, we show that the frequency of the vibration during the sliding of a droplet on a micropillar array does not depend on the sliding velocity nor the volume of the droplet.
|Title of host publication
|MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems
|Institute of Electrical and Electronics Engineers Inc.
|Number of pages
|Published - 2016 Feb 26
|29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 - Shanghai, China
Duration: 2016 Jan 24 → 2016 Jan 28
|Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
|29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016
|16/1/24 → 16/1/28
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Mechanical Engineering
- Electrical and Electronic Engineering