Thermochemical micro imprinting of single-crystal diamond surface using a nickel mold under high-pressure conditions

Yuji Imoto, Jiwang Yan

Research output: Contribution to journalArticlepeer-review

14 Citations (Scopus)


Single-crystal diamond is an important material for cutting tools, micro electro mechanical systems, optical devices, and semiconductor substrates. However, the techniques for producing microstructures on diamond surface with high efficiency and accuracy have not been established. This paper proposes a thermochemical imprinting method for transferring microstructures from a nickel (Ni) mold onto single-crystal diamond surface. The Ni mold was micro-structured by a nanoindenter and then pressed against the diamond surface under high temperature and pressure in argon atmosphere. Results show that microstructures on the Ni mold were successfully transferred onto the diamond surface, and their depth increased with both pressure and temperature. Laser micro-Raman spectroscopy, transmission electron microscopy (TEM) and electron energy loss spectroscopy (EELS) analyses indicate that a graphite layer was formed over the contact area between diamond and Ni during pressing, and after washing by a mixed acid, the graphite layer could be completely removed. This study demonstrated the feasibility of a cost-efficient fabrication method for large-area microstructures on single-crystal diamond.

Original languageEnglish
Pages (from-to)318-325
Number of pages8
JournalApplied Surface Science
Publication statusPublished - 2017 May 15


  • Carbon diffusion
  • Imprinting
  • Microstructure
  • Nickel mold
  • Single-crystal diamond
  • Thermochemical reaction

ASJC Scopus subject areas

  • Surfaces, Coatings and Films


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