Three-dimensional photonic crystals fabricated by double-angled plasma etching

Shigeki Takahashi; Takeshi Nakamori; Makoto Okano; Masahiro Imada; Susumu Noda

Three-dimensional photonic crystals fabricated by double-angled plasma etching

Shigeki Takahashi, Takeshi Nakamori, Makoto Okano, Masahiro Imada, Susumu Noda

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Three-dimensional photonic crystals with a depth of two lattice constants are successfully fabricated by a two-stage angled plasma etching method. The sample showed ~90% reflectance and ~10dB attenuation around the photonic bandgap wavelength region.

Original language	English
Title of host publication	Photonic Applications Systems Technologies Conference, PhAST 2007
Publisher	Optical Society of America
ISBN (Print)	1557528349, 9781557528346
Publication status	Published - 2007 Jan 1
Externally published	Yes
Event	Photonic Applications Systems Technologies Conference, PhAST 2007 - Baltimore, MD, United States Duration: 2007 May 8 → 2007 May 8

Publication series

Name	Optics InfoBase Conference Papers
ISSN (Electronic)	2162-2701

Other

Other	Photonic Applications Systems Technologies Conference, PhAST 2007
Country/Territory	United States
City	Baltimore, MD
Period	07/5/8 → 07/5/8

ASJC Scopus subject areas

Instrumentation
Atomic and Molecular Physics, and Optics

Cite this

Takahashi, S, Nakamori, T, Okano, M, Imada, M & Noda, S 2007, Three-dimensional photonic crystals fabricated by double-angled plasma etching. in Photonic Applications Systems Technologies Conference, PhAST 2007. Optics InfoBase Conference Papers, Optical Society of America, Photonic Applications Systems Technologies Conference, PhAST 2007, Baltimore, MD, United States, 07/5/8.

@inproceedings{fef7d8c68b22476a86696860dd849d3c,

title = "Three-dimensional photonic crystals fabricated by double-angled plasma etching",

abstract = "Three-dimensional photonic crystals with a depth of two lattice constants are successfully fabricated by a two-stage angled plasma etching method. The sample showed ~90% reflectance and ~10dB attenuation around the photonic bandgap wavelength region.",

author = "Shigeki Takahashi and Takeshi Nakamori and Makoto Okano and Masahiro Imada and Susumu Noda",

year = "2007",

month = jan,

day = "1",

language = "English",

isbn = "1557528349",

series = "Optics InfoBase Conference Papers",

publisher = "Optical Society of America",

booktitle = "Photonic Applications Systems Technologies Conference, PhAST 2007",

note = "Photonic Applications Systems Technologies Conference, PhAST 2007 ; Conference date: 08-05-2007 Through 08-05-2007",

}

TY - GEN

T1 - Three-dimensional photonic crystals fabricated by double-angled plasma etching

AU - Takahashi, Shigeki

AU - Nakamori, Takeshi

AU - Okano, Makoto

AU - Imada, Masahiro

AU - Noda, Susumu

PY - 2007/1/1

Y1 - 2007/1/1

N2 - Three-dimensional photonic crystals with a depth of two lattice constants are successfully fabricated by a two-stage angled plasma etching method. The sample showed ~90% reflectance and ~10dB attenuation around the photonic bandgap wavelength region.

AB - Three-dimensional photonic crystals with a depth of two lattice constants are successfully fabricated by a two-stage angled plasma etching method. The sample showed ~90% reflectance and ~10dB attenuation around the photonic bandgap wavelength region.

UR - http://www.scopus.com/inward/record.url?scp=84898980116&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84898980116&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:84898980116

SN - 1557528349

SN - 9781557528346

T3 - Optics InfoBase Conference Papers

BT - Photonic Applications Systems Technologies Conference, PhAST 2007

PB - Optical Society of America

T2 - Photonic Applications Systems Technologies Conference, PhAST 2007

Y2 - 8 May 2007 through 8 May 2007

ER -

Three-dimensional photonic crystals fabricated by double-angled plasma etching

Abstract

Publication series

Other

ASJC Scopus subject areas

Other files and links

Fingerprint

Cite this