Three-dimensional photonic crystals fabricated by double-angled plasma etching

Shigeki Takahashi; Takeshi Nakamori; Makoto Okano; Masahiro Imada; Susumu Noda

Three-dimensional photonic crystals fabricated by double-angled plasma etching

Shigeki Takahashi, Takeshi Nakamori, Makoto Okano, Masahiro Imada, Susumu Noda

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Three-dimensional photonic crystals with a depth of two lattice constants are successfully fabricated by a two-stage angled plasma etching method. The sample showed ~90% reflectance and ~10dB attenuation around the photonic bandgap wavelength region.

Original language	English
Title of host publication	Conference on Lasers and Electro-Optics, CLEO 2007
Publisher	Optical Society of America
ISBN (Print)	1557528349, 9781557528346
Publication status	Published - 2007 Jan 1
Externally published	Yes
Event	Conference on Lasers and Electro-Optics, CLEO 2007 - Baltimore, MD, United States Duration: 2007 May 6 → 2007 May 6

Publication series

Name	Optics InfoBase Conference Papers
ISSN (Electronic)	2162-2701

Other

Other	Conference on Lasers and Electro-Optics, CLEO 2007
Country/Territory	United States
City	Baltimore, MD
Period	07/5/6 → 07/5/6

ASJC Scopus subject areas

Instrumentation
Atomic and Molecular Physics, and Optics

Cite this

@inproceedings{173ee4d59661420a8af7a0b3fea904ed,

title = "Three-dimensional photonic crystals fabricated by double-angled plasma etching",

abstract = "Three-dimensional photonic crystals with a depth of two lattice constants are successfully fabricated by a two-stage angled plasma etching method. The sample showed ~90% reflectance and ~10dB attenuation around the photonic bandgap wavelength region.",

author = "Shigeki Takahashi and Takeshi Nakamori and Makoto Okano and Masahiro Imada and Susumu Noda",

year = "2007",

month = jan,

day = "1",

language = "English",

isbn = "1557528349",

series = "Optics InfoBase Conference Papers",

publisher = "Optical Society of America",

booktitle = "Conference on Lasers and Electro-Optics, CLEO 2007",

note = "Conference on Lasers and Electro-Optics, CLEO 2007 ; Conference date: 06-05-2007 Through 06-05-2007",

}

TY - GEN

T1 - Three-dimensional photonic crystals fabricated by double-angled plasma etching

AU - Takahashi, Shigeki

AU - Nakamori, Takeshi

AU - Okano, Makoto

AU - Imada, Masahiro

AU - Noda, Susumu

PY - 2007/1/1

Y1 - 2007/1/1

N2 - Three-dimensional photonic crystals with a depth of two lattice constants are successfully fabricated by a two-stage angled plasma etching method. The sample showed ~90% reflectance and ~10dB attenuation around the photonic bandgap wavelength region.

AB - Three-dimensional photonic crystals with a depth of two lattice constants are successfully fabricated by a two-stage angled plasma etching method. The sample showed ~90% reflectance and ~10dB attenuation around the photonic bandgap wavelength region.

UR - http://www.scopus.com/inward/record.url?scp=84898929825&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84898929825&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:84898929825

SN - 1557528349

SN - 9781557528346

T3 - Optics InfoBase Conference Papers

BT - Conference on Lasers and Electro-Optics, CLEO 2007

PB - Optical Society of America

T2 - Conference on Lasers and Electro-Optics, CLEO 2007

Y2 - 6 May 2007 through 6 May 2007

ER -

Three-dimensional photonic crystals fabricated by double-angled plasma etching

Abstract

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ASJC Scopus subject areas

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