Electron swarm transport in rf fields under spatial homogeneity has been investigated by a direct numerical procedure (DNP) of the Boltzmann equation. The accuracy and validity of the DNP is examined by comparison with the previous results in Reid's inelastic ramp model gas in dc fields. The electron velocity distribution with strong nonlinear time variation and high anisotropy is demonstrated and discussed in Ar with the rf swarm parameter in order to show the power of the DNP over a wide range of frequency.
ASJC Scopus subject areas
- General Engineering
- General Physics and Astronomy