Tool Dynamics-induced Surface Topography Error in Fast Tool Servo-Based Diamond Turning of Micro Dome Arrays

Micro dome arrays are applied as moulds to injection/press moulding to produce micro lens arrays. Fast tool servo (FTS) based diamond turning is a promising technique for manufacturing such micro dome arrays with high accuracy and machining efficiency. In this study, cutting of micro dome array (MDA) on copper with FTS was performed to evaluate the dynamics behaviour of the tool servo and its effects on surface topography. Results show that local surface speed dramatically affects the servo dynamics behaviour. When the local surface speed is higher than a critical value, overcutting and wavy patterns could be formed on the cut-in area of the domes and exit area, which is caused by the servo response and its limitation. By capturing and analysing the position signal and correlating it with the surface topography of the generated dome surface and considering its limitations, an effective strategy for optimizing micro dome array machining parameters was proposed. MDA cutting tests with optimized cutting conditions achieved a significantly improved form accuracy. This study will guide the optimal use of FTS systems in machining micro structured surfaces.