Towards nanostructuring with femtosecond laser pulses

Jürgen Koch, Takasumi Tanabe, Frank Korte, Carsten Fallnich, Andreas Ostendorf, Boris N. Chichkov

Research output: Contribution to journalConference articlepeer-review

1 Citation (Scopus)


Micro- and nanostructuring are very important for the fabrication of new materials and multifunctional devices. Existing photo-lithographic technologies can only be applied to a limited number of materials and used on plane surfaces. Whereas, microstructuring with femtosecond laser pulses has established itself as an excellent and universal tool for micro-processing, it is still unclear what are the limits of this technology. It is of great interest to use this technique also for nanostructuring. With tightly focused femtosecond laser pulses one can produce sub-micrometer holes and structures whose quality depends on the material. We present new results on nanostructuring of different materials with femtosecond laser pulses in an attempt to make this an universal technology, and discuss its reproducibility, and further prospects for quality control.

Original languageEnglish
Article number118
Pages (from-to)743-748
Number of pages6
JournalProceedings of SPIE - The International Society for Optical Engineering
Publication statusPublished - 2004
EventFifth International Symposium on Laser Precision Microfabrication - Nara, Japan
Duration: 2004 May 112004 May 14


  • Femtosecond lasers
  • Material processing
  • Nanostructuring

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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