Abstract
We present calculations of swarm data and rate coefficients for electrons in mixtures of Ar and HBr. The transport data were calculated using a Monte Carlo simulation over a broad range of E/N (electric field E to the gas number density N ratio) and with the idea to provide a basis for models of plasma etching involving HBr. The total cross section has an almost a constant collision frequency, which leads to rather uneventful E/N dependences of the transport data in pure HBr, but the mixtures with Ar involve more complex kinetic phenomena.
| Original language | English |
|---|---|
| Pages (from-to) | 3560-3565 |
| Number of pages | 6 |
| Journal | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers |
| Volume | 46 |
| Issue number | 6 A |
| DOIs | |
| Publication status | Published - 2007 Jun 6 |
| Externally published | Yes |
Keywords
- Collisions
- Electron transport
- Fluid models
- HBr
- Plasma etching
- Swarms
- Transport coefficients
ASJC Scopus subject areas
- Engineering(all)
- Physics and Astronomy(all)