Tunable metamaterials by controlling sub-micron gap for the THz range

Akihiro Isozaki; Tetsuo Kan; Hidetoshi Takahashi; Natsuki Kanda; Natsuki Nemoto; Kuniaki Konishi; Makoto Kuwata-Gonokami; Kiyoshi Matsumoto; Isao Shimoyama

doi:10.1109/MEMSYS.2014.6765868

Tunable metamaterials by controlling sub-micron gap for the THz range

Akihiro Isozaki, Tetsuo Kan, Hidetoshi Takahashi, Natsuki Kanda, Natsuki Nemoto, Kuniaki Konishi, Makoto Kuwata-Gonokami, Kiyoshi Matsumoto, Isao Shimoyama

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

4 Citations (Scopus)

Abstract

We propose a tunable metamaterial actuated by pneumatic force. The unit of the proposed metamaterial has a pair of sprit-ring-resonators (SRR), and the gap between them is controllable around sub-micron-order in size. One SRR is formed on a thin cantilever, which can be bent due to differential pressure between the upper and lower surfaces of the cantilever, whereas the other is fixed on a thin membrane. We confirmed that controlling the gap ranging from sub-micron-order to a few-micron-order was suitable for tuning a resonant frequency of a terahertz metamaterial.

Original language	English
Title of host publication	MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1221-1224
Number of pages	4
ISBN (Print)	9781479935086
DOIs	https://doi.org/10.1109/MEMSYS.2014.6765868
Publication status	Published - 2014 Jan 1
Externally published	Yes
Event	27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014 - San Francisco, CA, United States Duration: 2014 Jan 26 → 2014 Jan 30

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Other

Other	27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014
Country/Territory	United States
City	San Francisco, CA
Period	14/1/26 → 14/1/30

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMSYS.2014.6765868

Cite this

Isozaki, A., Kan, T., Takahashi, H., Kanda, N., Nemoto, N., Konishi, K., Kuwata-Gonokami, M., Matsumoto, K., & Shimoyama, I. (2014). Tunable metamaterials by controlling sub-micron gap for the THz range. In MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems (pp. 1221-1224). Article 6765868 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2014.6765868

Tunable metamaterials by controlling sub-micron gap for the THz range. / Isozaki, Akihiro; Kan, Tetsuo; Takahashi, Hidetoshi et al.
MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc., 2014. p. 1221-1224 6765868 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Isozaki, A, Kan, T, Takahashi, H, Kanda, N, Nemoto, N, Konishi, K, Kuwata-Gonokami, M, Matsumoto, K & Shimoyama, I 2014, Tunable metamaterials by controlling sub-micron gap for the THz range. in MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems., 6765868, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Institute of Electrical and Electronics Engineers Inc., pp. 1221-1224, 27th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2014, San Francisco, CA, United States, 14/1/26. https://doi.org/10.1109/MEMSYS.2014.6765868

Isozaki A, Kan T, Takahashi H, Kanda N, Nemoto N, Konishi K et al. Tunable metamaterials by controlling sub-micron gap for the THz range. In MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc. 2014. p. 1221-1224. 6765868. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2014.6765868

Isozaki, Akihiro ; Kan, Tetsuo ; Takahashi, Hidetoshi et al. / Tunable metamaterials by controlling sub-micron gap for the THz range. MEMS 2014 - 27th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc., 2014. pp. 1221-1224 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

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abstract = "We propose a tunable metamaterial actuated by pneumatic force. The unit of the proposed metamaterial has a pair of sprit-ring-resonators (SRR), and the gap between them is controllable around sub-micron-order in size. One SRR is formed on a thin cantilever, which can be bent due to differential pressure between the upper and lower surfaces of the cantilever, whereas the other is fixed on a thin membrane. We confirmed that controlling the gap ranging from sub-micron-order to a few-micron-order was suitable for tuning a resonant frequency of a terahertz metamaterial.",

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AU - Konishi, Kuniaki

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Tunable metamaterials by controlling sub-micron gap for the THz range

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