Two-dimensional images of radiative and metastable excited state radial profiles for an inductively coupled plasma in argon

Hajime Hirata; Masahiro Tadokoro; Nobuhiko Nakano; Zoran Lj Petrović; Toshiaki Makabe

doi:10.1109/27.763028

Two-dimensional images of radiative and metastable excited state radial profiles for an inductively coupled plasma in argon

Hajime Hirata, Masahiro Tadokoro, Nobuhiko Nakano, Zoran Lj Petrović, Toshiaki Makabe

Department of Electronics and Electrical Engineering

Research output: Contribution to journal › Article › peer-review

10 Citations (Scopus)

Abstract

Inductively coupled plasma (ICP) was shown to be characterized by a substantial degree of stepwise excitation due to a large density of metastable atoms and an even larger population of electrons. The kinetics of metastables strongly affects the structure of the discharge and we have applied laser absorption spectroscopy to establish the density profile of argon metastables Ar(1s₅) in a single turn coil geometry. At the same time the radial profiles of the radiative Ar(3p₅) state obtained by using a computer-aided tomography are significantly different indicating the effect of electron induced quenching and stepwise processes in kinetics of the two states.

Original language	English
Pages (from-to)	50-51
Number of pages	2
Journal	IEEE Transactions on Plasma Science
Volume	27
Issue number	1
DOIs	https://doi.org/10.1109/27.763028
Publication status	Published - 1999

ASJC Scopus subject areas

Nuclear and High Energy Physics
Condensed Matter Physics

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title = "Two-dimensional images of radiative and metastable excited state radial profiles for an inductively coupled plasma in argon",

abstract = "Inductively coupled plasma (ICP) was shown to be characterized by a substantial degree of stepwise excitation due to a large density of metastable atoms and an even larger population of electrons. The kinetics of metastables strongly affects the structure of the discharge and we have applied laser absorption spectroscopy to establish the density profile of argon metastables Ar(1s5) in a single turn coil geometry. At the same time the radial profiles of the radiative Ar(3p5) state obtained by using a computer-aided tomography are significantly different indicating the effect of electron induced quenching and stepwise processes in kinetics of the two states.",

author = "Hajime Hirata and Masahiro Tadokoro and Nobuhiko Nakano and Petrovi{\'c}, {Zoran Lj} and Toshiaki Makabe",

note = "Funding Information: Manuscript received May 18, 1998; revised November 12, 1998. This work was supported by the Monbusho International Scientific Program (08044169) and the Association of Super-Advanced Electronics Technologies (ASET).",

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T1 - Two-dimensional images of radiative and metastable excited state radial profiles for an inductively coupled plasma in argon

AU - Hirata, Hajime

AU - Tadokoro, Masahiro

AU - Nakano, Nobuhiko

AU - Petrović, Zoran Lj

AU - Makabe, Toshiaki

N1 - Funding Information: Manuscript received May 18, 1998; revised November 12, 1998. This work was supported by the Monbusho International Scientific Program (08044169) and the Association of Super-Advanced Electronics Technologies (ASET).

PY - 1999

Y1 - 1999

N2 - Inductively coupled plasma (ICP) was shown to be characterized by a substantial degree of stepwise excitation due to a large density of metastable atoms and an even larger population of electrons. The kinetics of metastables strongly affects the structure of the discharge and we have applied laser absorption spectroscopy to establish the density profile of argon metastables Ar(1s5) in a single turn coil geometry. At the same time the radial profiles of the radiative Ar(3p5) state obtained by using a computer-aided tomography are significantly different indicating the effect of electron induced quenching and stepwise processes in kinetics of the two states.

AB - Inductively coupled plasma (ICP) was shown to be characterized by a substantial degree of stepwise excitation due to a large density of metastable atoms and an even larger population of electrons. The kinetics of metastables strongly affects the structure of the discharge and we have applied laser absorption spectroscopy to establish the density profile of argon metastables Ar(1s5) in a single turn coil geometry. At the same time the radial profiles of the radiative Ar(3p5) state obtained by using a computer-aided tomography are significantly different indicating the effect of electron induced quenching and stepwise processes in kinetics of the two states.

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Two-dimensional images of radiative and metastable excited state radial profiles for an inductively coupled plasma in argon

Abstract

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