@article{2712b6727502449585053e52fbc641c9,
title = "Ultraflexible Transparent Oxide/Metal/Oxide Stack Electrode with Low Sheet Resistance for Electrophysiological Measurements",
abstract = "Flexible, transparent electrodes are a crucial component for future implantable and wearable systems. For practical applications, conductivity and flexibility should be further improved to prevent signal attenuation, heat generation, and disconnection. Herein, we fabricate an ultraflexible transparent electrode with low sheet resistance (8.6 ω/sq) using an indium-tin-oxide/Au/indium-tin-oxide (ITO) multilayer on a 1 μm thick parylene substrate. The electrodes were foldable and when compared to pristine ITO displayed greater mechanical robustness. Applicability for large-area applications was confirmed through electrochemical impedance measurements, and the compatibility of electrode arrays for in vivo applications was demonstrated with an optogenetic experiment. As a result of the ultraflexible transparent electrode's excellent conformity to soft tissue, voltage signals induced by light stimulation directly below the electrode were successfully recorded on the moving muscle.",
keywords = "flexibility, implantable device, indium-tin-oxide, neural recording, optogenetics, oxide/metal/oxide, transparent electrode, ultrathin metal",
author = "Yasutoshi Jimbo and Naoji Matsuhisa and Wonryung Lee and Peter Zalar and Hiroaki Jinno and Tomoyuki Yokota and Masaki Sekino and Takao Someya",
note = "Funding Information: We wish to thank Akira Shimada, Mari Koizumi, Yutaro Tachibana, Masae Nagase, and Satoshi Tanaka for their help in building the setup for the experiments. We also express our thanks to Dr. Kenta Takashima, Dr. David D. Ordinario, Sunghoon Lee, and Hanbit Jin for fruitful scientific discussions. We are indebted to Prof. Hiromu Yawo at Tohoku University for supplying the rat used for the optogenetic experiments. Y.J. and W.L. are supported by the Materials Education program for the future leaders in Research, Industry, and Technology (MERIT). N.M. is supported by the Advanced Leading Graduate Course for Photon Science (ALPS) and the Japan Society for the Promotion of Science (JSPS) research fellowship for young scientists. Funding Information: *E-mail: someya@ee.t.u-tokyo.ac.jp. ORCID Tomoyuki Yokota: 0000-0003-1546-8864 Takao Someya: 0000-0003-3051-1138 Present Address §P.Z. is currently at Holst Centre/TNO, High Tech Campus 31, 5656 AE Eindhoven, The Netherlands Author Contributions Y.J., N.M., W.L., P.Z., H.J., and T.Y. contributed to device fabrication, measurements, and analysis. Y.J., W.L., and M.S. arranged the animal experiments. Y.J. and N.M. prepared the manuscript with the help of the rest of the authors. T.S. supervised the entire project. Funding This work was supported by the JST Bio-Harmonized ERATO grant (JPM JER 1105). Notes The authors declare no competing financial interest. Publisher Copyright: {\textcopyright} 2017 American Chemical Society.",
year = "2017",
month = oct,
day = "11",
doi = "10.1021/acsami.7b12802",
language = "English",
volume = "9",
pages = "34744--34750",
journal = "ACS Applied Materials and Interfaces",
issn = "1944-8244",
publisher = "American Chemical Society",
number = "40",
}