Ultraviolet-Laser-Induced Crystallization of Sol-Gel Derived Indium Oxide Films

Hiroaki Imai; Atsushi Tominaga; Hiroshi Hirashima; Motoyuki Toki; Mamoru Aizawa

doi:10.1023/a:1008604213960

Ultraviolet-Laser-Induced Crystallization of Sol-Gel Derived Indium Oxide Films

Hiroaki Imai, Atsushi Tominaga, Hiroshi Hirashima, Motoyuki Toki, Mamoru Aizawa

Department of Applied Chemistry

Research output: Contribution to journal › Article › peer-review

41 Citations (Scopus)

Abstract

Modification of sol-gel derived indium oxide thin films using ultraviolet lasers was investigated. Irradiation by an ArF excimer (6.4 eV) and the fourth harmonic generation of a Nd:YAG laser (4.7 eV) was found to be effective in crystallization with a loss of hydroxyl groups and a decrease in the sheet resistance of the sol-gel films. Transparent crystalline indium oxide films were successfully obtained by 6.4 eV laser irradiation at fluences below 20 mJ/(cm²·shot), whereas degradation of the films was induced by a relatively high-fluence beam.

Original language	English
Pages (from-to)	991-994
Number of pages	4
Journal	Journal of Sol-Gel Science and Technology
Volume	13
Issue number	1-3
DOIs	https://doi.org/10.1023/a:1008604213960
Publication status	Published - 1998 Jan

Keywords

Crystallization
ITO
Indium oxide
Sol-gel
Ultraviolet laser

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Ceramics and Composites
Chemistry(all)
Biomaterials
Condensed Matter Physics
Materials Chemistry

Access to Document

10.1023/a:1008604213960

Cite this

@article{d46d0f390d234b18a1e845cb214fe27d,

title = "Ultraviolet-Laser-Induced Crystallization of Sol-Gel Derived Indium Oxide Films",

abstract = "Modification of sol-gel derived indium oxide thin films using ultraviolet lasers was investigated. Irradiation by an ArF excimer (6.4 eV) and the fourth harmonic generation of a Nd:YAG laser (4.7 eV) was found to be effective in crystallization with a loss of hydroxyl groups and a decrease in the sheet resistance of the sol-gel films. Transparent crystalline indium oxide films were successfully obtained by 6.4 eV laser irradiation at fluences below 20 mJ/(cm2·shot), whereas degradation of the films was induced by a relatively high-fluence beam.",

keywords = "Crystallization, ITO, Indium oxide, Sol-gel, Ultraviolet laser",

author = "Hiroaki Imai and Atsushi Tominaga and Hiroshi Hirashima and Motoyuki Toki and Mamoru Aizawa",

year = "1998",

month = jan,

doi = "10.1023/a:1008604213960",

language = "English",

volume = "13",

pages = "991--994",

journal = "Journal of Sol-Gel Science and Technology",

issn = "0928-0707",

publisher = "Springer Netherlands",

number = "1-3",

}

TY - JOUR

T1 - Ultraviolet-Laser-Induced Crystallization of Sol-Gel Derived Indium Oxide Films

AU - Imai, Hiroaki

AU - Tominaga, Atsushi

AU - Hirashima, Hiroshi

AU - Toki, Motoyuki

AU - Aizawa, Mamoru

PY - 1998/1

Y1 - 1998/1

N2 - Modification of sol-gel derived indium oxide thin films using ultraviolet lasers was investigated. Irradiation by an ArF excimer (6.4 eV) and the fourth harmonic generation of a Nd:YAG laser (4.7 eV) was found to be effective in crystallization with a loss of hydroxyl groups and a decrease in the sheet resistance of the sol-gel films. Transparent crystalline indium oxide films were successfully obtained by 6.4 eV laser irradiation at fluences below 20 mJ/(cm2·shot), whereas degradation of the films was induced by a relatively high-fluence beam.

AB - Modification of sol-gel derived indium oxide thin films using ultraviolet lasers was investigated. Irradiation by an ArF excimer (6.4 eV) and the fourth harmonic generation of a Nd:YAG laser (4.7 eV) was found to be effective in crystallization with a loss of hydroxyl groups and a decrease in the sheet resistance of the sol-gel films. Transparent crystalline indium oxide films were successfully obtained by 6.4 eV laser irradiation at fluences below 20 mJ/(cm2·shot), whereas degradation of the films was induced by a relatively high-fluence beam.

KW - Crystallization

KW - ITO

KW - Indium oxide

KW - Sol-gel

KW - Ultraviolet laser

UR - http://www.scopus.com/inward/record.url?scp=0032308130&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0032308130&partnerID=8YFLogxK

U2 - 10.1023/a:1008604213960

DO - 10.1023/a:1008604213960

M3 - Article

AN - SCOPUS:0032308130

SN - 0928-0707

VL - 13

SP - 991

EP - 994

JO - Journal of Sol-Gel Science and Technology

JF - Journal of Sol-Gel Science and Technology

IS - 1-3

ER -

Ultraviolet-Laser-Induced Crystallization of Sol-Gel Derived Indium Oxide Films

Abstract

Keywords

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this