Ultraviolet-Laser-Induced Crystallization of Sol-Gel Derived Indium Oxide Films

Hiroaki Imai, Atsushi Tominaga, Hiroshi Hirashima, Motoyuki Toki, Mamoru Aizawa

Research output: Contribution to journalArticlepeer-review

41 Citations (Scopus)


Modification of sol-gel derived indium oxide thin films using ultraviolet lasers was investigated. Irradiation by an ArF excimer (6.4 eV) and the fourth harmonic generation of a Nd:YAG laser (4.7 eV) was found to be effective in crystallization with a loss of hydroxyl groups and a decrease in the sheet resistance of the sol-gel films. Transparent crystalline indium oxide films were successfully obtained by 6.4 eV laser irradiation at fluences below 20 mJ/(cm2·shot), whereas degradation of the films was induced by a relatively high-fluence beam.

Original languageEnglish
Pages (from-to)991-994
Number of pages4
JournalJournal of Sol-Gel Science and Technology
Issue number1-3
Publication statusPublished - 1998 Jan


  • Crystallization
  • ITO
  • Indium oxide
  • Sol-gel
  • Ultraviolet laser

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Chemistry(all)
  • Biomaterials
  • Condensed Matter Physics
  • Materials Chemistry


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