TY - JOUR
T1 - UV laser photo-polymerization of elastic 2D/3D structures using photo-curable PDMS (Polydimethylsiloxane)
AU - Suttmann, Oliver
AU - Obata, Kotaro
AU - Nakajima, Yasutaka
AU - Hohnholz, Arndt
AU - Koch, Jürgen
AU - Terakawa, Mitsuhiro
AU - Overmeyer, Ludger
N1 - Funding Information:
Authors would like to thank Shin-Etsu Silicones Europe B.V. for providing the PDMS sample and Katie Xu for supporting the technical discussion. This research was supported in a part of joint research projects by "Projektbe-zogener Personenaustausch mit Japan” (DAAD-JSPS) Joint Research Program (Project 57245147). The authors acknowledge financial support in the frame of the 3D-PolySPRINT Project (BMBF FKZ 13N13567).
Publisher Copyright:
© Journal of Laser Micro/Nanoengineering. 2017.
PY - 2017
Y1 - 2017
N2 - 2D/3D structuring of UV curable polydimethylsiloxane (PDMS) was developed using UV laser direct writing. In this technique, commercially available UV curable PDMS was locally polymerized to fabricate 1D and 2D single layer structures, as well as 3D multi-layer structures with sufficient stability in process resolutions. The tightly focused UV laser beam was scanned by an x-y galvano-metric mirror scanner on the UV curable PDMS layer coated on the glass substrate, so that 18μm of process resolution in X-Y plane was obtained. At the relevant wavelength of 355 nm, the absorbance of UV curable PDMS was 0.131, which is sufficient absorbance for a photo-chemical reaction induced by the UV laser used in this study. In addition, UV curable PDMS has a deep penetration depth, longer than 3 mm, which enabled the fabrication of a structure with an aspect ratio of 3 in a single layer. Furthermore, the fabricated structure demonstrated mechanical strength to emphasize its elasticity.
AB - 2D/3D structuring of UV curable polydimethylsiloxane (PDMS) was developed using UV laser direct writing. In this technique, commercially available UV curable PDMS was locally polymerized to fabricate 1D and 2D single layer structures, as well as 3D multi-layer structures with sufficient stability in process resolutions. The tightly focused UV laser beam was scanned by an x-y galvano-metric mirror scanner on the UV curable PDMS layer coated on the glass substrate, so that 18μm of process resolution in X-Y plane was obtained. At the relevant wavelength of 355 nm, the absorbance of UV curable PDMS was 0.131, which is sufficient absorbance for a photo-chemical reaction induced by the UV laser used in this study. In addition, UV curable PDMS has a deep penetration depth, longer than 3 mm, which enabled the fabrication of a structure with an aspect ratio of 3 in a single layer. Furthermore, the fabricated structure demonstrated mechanical strength to emphasize its elasticity.
KW - Additive manufacturing
KW - Laser direct writing
KW - Photo-polymerization
KW - UV curable PDMS
KW - UV laser
UR - http://www.scopus.com/inward/record.url?scp=85044587456&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85044587456&partnerID=8YFLogxK
U2 - 10.2961/jlmn.2017.02.0018
DO - 10.2961/jlmn.2017.02.0018
M3 - Article
AN - SCOPUS:85044587456
SN - 1880-0688
VL - 12
SP - 153
EP - 158
JO - Journal of Laser Micro Nanoengineering
JF - Journal of Laser Micro Nanoengineering
IS - 2
ER -