Variable forgetting factor-based friction compensation method of precision stages

Shigeki Goka, Seiji Hashimoto, Kiyoshi Ohishi, Takeo Ishikawa, Shuichi Adachi, Koji Kosaka, Hiroshi Kubota, Tadahiro Ohmi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)


This paper presents the nonresonant ultrasonic motor (SPIDER)-driven precision stage control based on an adaptive identification method with a variable forgetting factor (VFF). SPIDER-driven stage has a strong non-linearity due to the frictional drive mechanism. Focusing on the VFF, dynamical change of frictional property is detected. Therefore, fast and precise friction compensation can be performed based on the VFF. The validity of both the identification and compensation methods is verified through experiments.

Original languageEnglish
Title of host publication2006 SICE-ICASE International Joint Conference
PublisherInstitute of Control Automation and Systems Engineers (ICASE)
Number of pages6
ISBN (Print)8995003855, 9788995003855
Publication statusPublished - 2006
Event2006 SICE-ICASE International Joint Conference - Busan, Korea, Republic of
Duration: 2006 Oct 182006 Oct 21

Publication series

Name2006 SICE-ICASE International Joint Conference


Other2006 SICE-ICASE International Joint Conference
Country/TerritoryKorea, Republic of


  • Adaptive identification
  • Friction compensation
  • Ultra-precision stage
  • Variable forgetting factor

ASJC Scopus subject areas

  • Computer Science Applications
  • Control and Systems Engineering
  • Electrical and Electronic Engineering


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